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Volumn 20, Issue 12, 2010, Pages

Three-dimensional photolithography technology for a fiber substrate using a microfabricated exposure module

Author keywords

[No Author keywords available]

Indexed keywords

EXPOSURE MODULES; FIBER SUBSTRATES; FINE PATTERN; HIGH RESOLUTION; LONG SERVICE LIFE; LOW COSTS; LOW-COST SOLUTION; MICRO PATTERNING; MICROFABRICATED; NON-PLANAR SURFACES; PHOTOLITHOGRAPHY PROCESS; PHOTOLITHOGRAPHY TECHNOLOGY; PROJECTION EXPOSURE; QUARTZ SUBSTRATE; RESIST FILMS; SPRAY COATING; SPRAY DEPOSITION; THREE-DIMENSIONAL (3D); THREE-DIMENSIONAL PHOTOLITHOGRAPHY;

EID: 78649754107     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125013     Document Type: Article
Times cited : (24)

References (24)
  • 1
    • 33745104422 scopus 로고    scopus 로고
    • Carbon fibers as a novel material for high performance microelectromechanical systems (MEMS)
    • Desai S, Netravali A N and Thompson M O 2006 Carbon fibers as a novel material for high performance microelectromechanical systems (MEMS) J. Micromech. Microeng. 16 1403-7
    • (2006) J. Micromech. Microeng , vol.16 , pp. 1403-1407
    • Desai, S.1    Netravali, A.N.2    Thompson, M.O.3
  • 2
    • 78649758663 scopus 로고    scopus 로고
    • Wire-shaped semiconductor light-emitting diodes for general-purpose lighting
    • Mauk M G 2002 Wire-shaped semiconductor light-emitting diodes for general-purpose lighting DOE Report DE-FG02-00ER82953
    • (2002) DOE Report DE-FG02-00ER82953
    • Mauk, M.G.1
  • 4
    • 78649734030 scopus 로고    scopus 로고
    • http://www.beanspj.org/gaiyou/index.html
  • 5
    • 0030211921 scopus 로고    scopus 로고
    • Fabrication and structural analysis of ZnO coated fiber optical phase modulators
    • Fox G R, Setter N and Limberger H G 1996 Fabrication and structural analysis of ZnO coated fiber optical phase modulators J. Mater. Res. 11 2051-61
    • (1996) J. Mater. Res. , vol.11 , pp. 2051-2061
    • Fox, G.R.1    Setter, N.2    Limberger, H.G.3
  • 6
    • 0035281401 scopus 로고    scopus 로고
    • Direct writing for three-dimensional microfabrication using synchrotron radiation etching
    • Katoh T, Nishi N, Fukagawa M, Ueno H and Sugiyama S 2001 Direct writing for three-dimensional microfabrication using synchrotron radiation etching Sensors Actuators A 89 10-5
    • (2001) Sensors Actuators A , vol.89 , pp. 10-15
    • Katoh, T.1    Nishi, N.2    Fukagawa, M.3    Ueno, H.4    Sugiyama, S.5
  • 8
    • 0036614695 scopus 로고    scopus 로고
    • Direct photolithography on optical fiber end
    • Sasaki M, Ando T, Nogawa S and Hane K 2002 Direct photolithography on optical fiber end J. Appl. Phys. 41 4350-5
    • (2002) J. Appl. Phys. , vol.41 , pp. 4350-4355
    • Sasaki, M.1    Ando, T.2    Nogawa, S.3    Hane, K.4
  • 10
    • 68249151158 scopus 로고    scopus 로고
    • Optical-softlithographic technology for patterning on curved surfaces
    • Kim J G, Takama N, Kim B J and Fujita H 2009 Optical-softlithographic technology for patterning on curved surfaces J. Micromech. Microeng. 19 055017
    • (2009) J. Micromech. Microeng , vol.19 , pp. 055017
    • Kim, J.G.1    Takama, N.2    Kim, B.J.3    Fujita, H.4
  • 13
    • 33846878310 scopus 로고    scopus 로고
    • Laser-lithography on non-planar surfaces
    • Radtke D and Zeitner U D 2007 Laser-lithography on non-planar surfaces Opt. Express 15 1167-74
    • (2007) Opt. Express , vol.15 , pp. 1167-1174
    • Radtke, D.1    Zeitner, U.D.2
  • 16
    • 35048859427 scopus 로고    scopus 로고
    • Advancing decal-transfer lithography with a reusable PDMS-coated nanoscale stamp
    • Kim M and Kim Y S 2007 Advancing decal-transfer lithography with a reusable PDMS-coated nanoscale stamp J. Am. Chem. Soc. 129 11304-5
    • (2007) J. Am. Chem. Soc. , vol.129 , pp. 11304-11305
    • Kim, M.1    Kim, Y.S.2
  • 18
    • 17444402137 scopus 로고    scopus 로고
    • Spray coating of photoresist for pattern transfer on high topography surfaces
    • Pham N P, Burghartz J N and Sarro P M 2005 Spray coating of photoresist for pattern transfer on high topography surfaces J. Micromech. Microeng. 15 691-7
    • (2005) J. Micromech. Microeng , vol.15 , pp. 691-697
    • Pham, N.P.1    Burghartz, J.N.2    Sarro, P.M.3
  • 19
    • 0042362189 scopus 로고    scopus 로고
    • Heating effect on photoresist in spray coating technique for three-dimensional lithography
    • Singh V K, Sasaki M, Song J H and Hane K 2003 Heating effect on photoresist in spray coating technique for three-dimensional lithography Japan. J. Appl. Phys. 42 4027-30
    • (2003) Japan. J. Appl. Phys. , vol.42 , pp. 4027-4030
    • Singh, V.K.1    Sasaki, M.2    Song, J.H.3    Hane, K.4
  • 21
    • 0041940609 scopus 로고    scopus 로고
    • Conformal coating by photoresist of sharp corners of anisotropically etched through-hole in silicon
    • Heschel M and Bouwstra S 1998 Conformal coating by photoresist of sharp corners of anisotropically etched through-hole in silicon Sensors Actuators A 70 75-80
    • (1998) Sensors Actuators A , vol.70 , pp. 75-80
    • Heschel, M.1    Bouwstra, S.2
  • 23
    • 30344482921 scopus 로고    scopus 로고
    • Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating
    • Ikehara T and Maeda R 2005 Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating Microsyst. Technol. 12 98-103
    • (2005) Microsyst. Technol. , vol.12 , pp. 98-103
    • Ikehara, T.1    Maeda, R.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.