Spray coating of photoresist for pattern transfer on high topography surfaces

Journal of Micromechanics and Microengineering

Volumn 15, Issue 4, 2005, Pages 691-697

  Pham, Nga P ^a   Burghartz, Joachim N ^a   Sarro, Pasqualina M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; NOZZLES; OPTIMIZATION; PATTERN RECOGNITION; SPRAYED COATINGS; SURFACE TOPOGRAPHY; THICKNESS MEASUREMENT;

HIGH TOPOGRAPHY SURFACES; PATTERN TRANSFER; PHOTORESIST LAYERS; RADIO FREQUENCY;

PHOTORESISTS;

EID: 17444402137     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/003     Document Type: Article

References (10)

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