Deposition of thin and uniform photoresist on three-dimensional structures using fast flow in spray coating

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2339-2345

  Singh, Vijay Kumar ^a   Sasaki, Minoru ^a   Hane, Kazuhiro ^a   Watanabe, Yoshihiko ^b   Takamatsu, Hirosuke ^b   Kawakita, Masato ^b   Hayashi, Hiroki ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b USHIO INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; PHOTOLITHOGRAPHY; SPRAYING;

CONCAVE CORNERS; DEFECT-FREE RESIST FILMS; PINHOLE EFFECTS; SPRAY COATING;

THIN FILMS;

EID: 27944489876     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/016     Document Type: Article

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