Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating

Microsystem Technologies

Volumn 12, Issue 1-2 SPEC. ISS., 2005, Pages 98-103

  Ikehara, T ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; ETCHING; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES; PHOTORESISTORS; REACTIVE ION ETCHING; SPRAYED COATINGS;

AREA PATTERNS; ETCHING AREA; RECIPE CONTROL; SPRAY COATING;

OPTICAL SWITCHES;

EID: 30344482921     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0008-8     Document Type: Conference Paper

References (8)

1. Helin P, Bourouina T, Houlet L, Reyne G, Fujita H (2001) Monolithic, single crystal silicon, vertical mirrors arrays with improved integration density for optical crossconnects. In: Proceedings of optical MEMS 2001. IEEE, pp 83-84
2. Hirata Y, Miura K, Numazawa T (2002) Optical switch composed of ribbon-like electrostatic actuator and LIGA mirror. In: Proceedings of the 19th sensor symposium. IEEJ, Tokyo, pp 355-358
3. Jansen H, Gardeniers H, de Boer M, Elwenspoek M, Fluitman J (1996) A survey on the reactive ion etching of silicon in microtechnology. J Micromech Microeng 6:14-28
4. Kalo Y, Mori K, Mase T, Takahashi A, Imaki O, Kaku R (2000) Development of 4×4 MEMS optical switch. In; Proceedings of optical MEMS 2000. IEEE, pp 95-96
5. Kobayashi T, Shan XC, Murakoshi Y, Maeda R (2003) A novel self-sensitive SFM for nondestructive measurement of tiny vertical surfaces with restricted access. In: Bergman K, Courtois B, Karam JM, Korving J, Markus K, Michel B (eds) Proceedings of DTIP 2003. TIMA Laboratory, Grenoble, pp 286-289
6. Noell W, Dellmann L, Marxer C, Weible K, Hoffmann M, de Rooij NF (2001) Hybrid 4×4 optical cross connector based on MEMS switches and integrated optical waveguides. In: Proceedings of optical MEMS 2001. IEEE, pp 13-14
7. Shan XC, Maeda R, Ikehara T, Suzuki T (2003a) Fabrication of high aspect ratio vertical mirrors for optical switches using silicon etching and hot emboss processes. In: Proceedings of HARMST 2003. pp 177-178
8. Shan XC, Maeda R, Ikehara T, Wang ZF, Wpng CK. (2003b) A polymer-based optical switch fabricated using silicon process, electroplating and micro hot embossing. Int J Comput Eng Sci 4:725-728