SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Micromechanics and Microengineering

Volumn 12, Issue 3, 2002, Pages 229-235

Novel MEMS pressure and temperature sensors fabricated on optical fibers

(4) Abeysinghe, Don C a Dasgupta, Samhita a,b Jackson, Howard E c Boyd, Joseph T d

a WRIGHT PATTERSON AIR FORCE BASE (United States)

b GE GLOBAL RESEARCH (United States)

c UNIVERSITY OF CINCINNATI (United States)

d University of Cincinnati (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROMACHINING; MULTIMODE FIBERS; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON; SENSORS;

PRESSURE SENSORS; TEMPERATURE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036571758 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/12/3/306 Document Type: Article

Times cited : (73)

References (14)

1
- 0035440918
- (2001) IEEE Photonics Technol. Lett. , vol.13 , pp. 993-995
- Abeysinghe, D.C.¹ Dasgupta, S.² Boyd, J.T.³ Jackson, H.E.⁴

2
- 0035304687
- (2001) Opt. Eng., Bellingham , vol.40 , pp. 598-604
- Zhou, J.¹ Dasgupta, S.² Kobayashi, H.³ Wolff, J.M.⁴ Jackson, H.E.⁵ Boyd, J.T.⁶

3
- 0026245019
- (1991) IEEE Trans. Biomed. Eng. , vol.38 , pp. 974-980
- Wolthuis, R.A.¹ Mitchell, G.L.² Hartle, J.C.³ Afromowitz, M.A.⁴

4
- 0029485205
- (1995) IEEE Photonics Technol. Lett. , vol.12 , pp. 1471-1473
- Kim, Y.¹ Neikirk, D.P.²

5
- 0032665175
- (1999) Proc. SPIE-Int. Soc. Opt. Eng. , vol.3680 , pp. 773-782
- Beggans, M.H.¹ Ivanov, D.I.² Fu, S.G.³ Digges T.G., Jr.⁴ Farmer, K.R.⁵

6
- 0022663164
- (1985) Electron. Lett. , vol.22 , pp. 238-239
- Beheim, G.¹

7
- 0033315113
- (1999) Opt. Laser Technol. , vol.31 , pp. 593-599
- Wilkins, V.¹ Wiemann, C.² Koch, C.³ Foth, H.J.⁴

8
- 0014563672
- (1969) J. Appl. Phys. , vol.40 , pp. 3946-3948
- Wallis, G.¹ Poerrantz, D.²

9
- 0003511412
- New York: Wiley
- (1988) Optical Waves in Layered Media
- Yeh, P.¹

10
- 0003974051
- New York: Dekker
- (1992) Flat and Corrugated Diaphragm Design Handbook
- Giovanni, M.D.¹

11
- 0030181536
- (1996) Sensors Actuators A , vol.55 , pp. 201-209
- Engelke, H.¹ Harz, M.²

12
- 0029325927
- (1995) J. Micromech. Microeng. , vol.5 , pp. 98-102
- Gozma, A.¹

13
- 0009264280
- 107459 Lewis Research Center Cleveland, OH
- (1997) NASA Technical Memorandum
- Beheim, G.¹

14
- 0003881170
- New York: McGraw-Hill
- (1978) Handbook of Optics
- Driscoll, W.G.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.