Phase transformation and capacitance enhancement of anodic zr O2 -Si O2

Journal of the Electrochemical Society

Volumn 157, Issue 12, 2010, Pages

  Koyama, S ^a   Aoki, Y ^a   Sakaguchi, N ^a   Nagata, S ^b   Habazaki, H ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY COMPOSITIONS; AMORPHOUS LAYER; AMORPHOUS OXIDES; ANODIC OXIDE FILM; ANODIC OXIDES; CAPACITANCE ENHANCEMENT; CRYSTALLINE LAYERS; FORMATION VOLTAGE; GROWTH PROCESS; LAYERED FILMS; OXIDE LAYER; PHASE TRANSFORMATION; SILICON CONTENTS;

AMORPHOUS FILMS; AMORPHOUS SILICON; ATOMS; CAPACITANCE; CRYSTALLINE MATERIALS; SILICON ALLOYS; ZIRCONIUM;

OXIDE FILMS;

EID: 78449310330     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3503592     Document Type: Article

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