Subeutectic synthesis of epitaxial Si-NWs with diverse catalysts using a novel Si precursor

Nano Letters

Volumn 10, Issue 10, 2010, Pages 3957-3961

  Molnar, W ^a   Lugstein, A ^a   Pongratz, P ^a   Auner, N ^b,c   Bauch, C ^b,c   Bertagnolli, E ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b Entwicklungszentrum Wolfen ^*  (Germany)

^c GOETHE UNIVERSITY   (Germany)

Author keywords

APCVD; Nanowire; octochlorotrisilane; silicon; subeutectic; vapor liquid solid

Indexed keywords

ALTERNATIVE CATALYSTS; APCVD; CATALYST PARTICLES; COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; EPITAXIAL SI; GROWTH CONDITIONS; LIQUID EUTECTICS; OCTOCHLOROTRISILANE; SILICON PRECURSORS; SOLID-PHASE DIFFUSION; SUBEUTECTIC; VAPOR-LIQUID-SOLID;

CATALYSTS; EPITAXIAL GROWTH; LIQUIDS; MOS DEVICES; NANOWIRES; PLATINUM; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR GROWTH; SILICON; VAPORS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77958039969     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl101744q     Document Type: Article

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