Reducing the effects of adhesion and friction in microelectromechanical systems (MEMSs) through surface roughening: Comparison between theory and experiments

Journal of Applied Physics

Volumn 98, Issue 7, 2005, Pages

  Tayebi, Noureddine ^a   Polycarpou, Andreas A ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ORDER OF MAGNITUDE; PEAKINESS; POLYSILICON FILMS; SURFACE-TO-VOLUME RATIOS;

ADHESION; COMPOSITE MICROMECHANICS; FRICTION; LOADS (FORCES); MECHANICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; SURFACE ROUGHNESS; THIN FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 27144444690     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2058178     Document Type: Article

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