Asymmetric surface roughness measurements and meniscus modeling of polysilicon surface micromachined flaps

Microsystem Technologies

Volumn 14, Issue 1, 2008, Pages 17-29

  Xue, Xiaojie ^a   Phinney, Leslie M ^a,b   Polycarpou, Andreas A ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACIAL ENERGY; SILICON NITRIDE; SURFACE MICROMACHINING; SURFACE ROUGHNESS;

ADHESIVE MENISCUS PROPERTIES; CAPILLARY ADHESION; STRUCTURAL POLYSILICON LAYERS; SURFACE ROUGHNESS PARAMETERS;

POLYSILICON;

EID: 34547829299     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0397-y     Document Type: Article

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