Some novel aspects of nanocrystalline diamond nucleation and growth by direct current plasma assisted chemical vapor deposition

Diamond and Related Materials

Volumn 19, Issue 11, 2010, Pages 1393-1400

  Lee, Hak Joo ^a,b   Li, H ^a   Jeon, Hyeongtag ^b   Lee, Wook Seong ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

Cathode temperature; Direct current plasma assisted CVD; Nanocrystalline diamond film; Nucleation

Indexed keywords

4-IN. SI; AVERAGE DIAMETER; CATHODE TEMPERATURE; CHAMBER PRESSURE; CRYSTALLINITIES; DIAMOND POWDERS; DIRECT CURRENT PLASMAS; DISCHARGE VOLTAGES; GAS FLOWRATE; GRAIN SIZE; INJECTION TIMING; NANOCRYSTALLINE DIAMOND FILM; NANOCRYSTALLINE DIAMOND FILMS; NANOCRYSTALLINE DIAMONDS; NCD FILMS; NEXAFS AND RAMAN SPECTROSCOPY; NUCLEATION AND GROWTH; NUCLEATION DENSITIES; SEM; SUBSTRATE TEMPERATURE; XRD;

CHEMICAL ANALYSIS; CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTRIC DISCHARGES; FILM GROWTH; GRAIN GROWTH; METHANE; METHANOL; NUCLEATION; PLASMA DEPOSITION; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TIME MEASUREMENT;

DIAMOND FILMS;

EID: 77957345104     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2010.08.006     Document Type: Article

References (35)

1. D.M. Gruen Annu. Rev. Mater. Sci. 29 1999 211 259
2. F. Mubarok, J.M. Carrapichano, F.A. Almeida, A.J.S. Fernandes, and R.F. Silva Diamond Relat. Mater. 17 2008 1132 1136
3. T. Zimmermann, M. Kubovic, A. Denisenko, K. Janischowsky, O.A. Williams, D.M. Gruen, and E. Kohn Diamond Relat. Mater. 14 2005 416 420
4. M.A. Angadi, T. Watanabe, A. Bodapati, X. Xiao, O. Auciello, J.A. Carlisle, J.A. Eastman, P. Keblinski, P.K. Schelling, and S.R. Phillpot J. Appl. Phys. 99 2006 11430
5. A. Aleksov, J.M. Gobien, X. Li, J.T. Prater, and Z. Sitar Diamond Relat. Mater. 15 2006 248 253
6. A.R. Krauss, O. Auciello, D.M. Gruen, A. Jayatissa, A. Sumant, J. Tucek, D.C. Mancini, N. Moldovan, A. Erdemir, D. Ersoy, M.N. Gardos, H.G. Busmann, E.M. Meyer, and M.Q. Ding Diamond Relat. Mater. 10 2001 1952 1961
7. L. Sekaric, J.M. Parpia, H.G. Craighead, T. Feygelson, B.H. Houston, and J.E. Butler Appl. Phys. Lett. 81 2002 4455 4457
8. A. Härtl, E. Schmich, J.A. Garrido, J. Hernando, S.C.R. Catharino, S. Walter, P. Feulner, A. Kromka, D. Steinmüller, and M. Stutzmann Nat. Mater. 3 2004 736 742
9. C.E. Nebel, D. Shin, B. Rezek, N. Tokuda, H. Uetsuka, H. Watanabe, and J.R. Soc Interface 4 2007 439 461
10. X. Xiao, J. Wang, C. Liu, J.A. Carlisle, B. Mech, R. Greenberg, D. Guven, R. Freda, M.S. Humayun, J. Weiland, and O. Auciello J. Biomed. Mater. Res. Part B: Appl. Biomater. 77B 2 2005 273 281
11. M. Amaral, P.S. Gomes, M.A. Lopes, J.D. Santos, R.F. Silva, and M.H. Fernandes J. Nanomater. 894352 2008 1 9
12. W. Kulisch, and C. Popov Phys. Stat. Sol. (a) 2 2006 203 218
13. W.-S. Lee, K.-W. Chae, K.-Y. Eun, and Y.-J. Baik Diamond Relat. Mater. 10 2001 2220 2224
14. W.-S. Lee, Y.-J. Baik, and K.-W. Chae Thin Solid Films 435 2003 89 94
15. L. Zeng, H. Peng, W. Wang, Y. Chen, D. Lei, W. Qi, J. Liang, J. Zhao, X. Kong, and H. Zhang J. Phys. Chem. C 112 2008 1401 1406
16. D.M. Gruen, P.C. Redfern, D.A. Horner, P. Zapol, and L.A. Curtiss J. Phys. Chem. B 103 1999 5459 5467
17. A. Heiman, I. Gouzman, S.H. Christiansen, H.P. Strunk, G. Comtet, L. Hellner, G. Dujardin, R. Edrei, and A. Hoffmana J. Appl. Phys. 89 2001 2622 2630
18. H. Li, H.-J. Lee, J.-K. Park, Y.-J. Baik, G.-W. Hwang, J.-h. Jeong, and W.-S. Lee Diamond Relat. Mater. 18 2009 1369 1374
19. I. Gouzman, I. Lior, and A. Hoffman Appl. Phys. Lett. 72 1998 296 298
20. S. Bhattacharyya, O. Auciello, J. Birrell, J.A. Carlisle, L.A. Curtiss, A.N. Goyette, D.M. Gruen, A.R. Krauss, J. Schlueter, A. Sumant, and P. Zapol Appl. Phys. Lett. 79 2001 1441 1443
21. G. Morell, A. González-Berríos, B.R. Weiner, and S. Gupta J. Mater. Sci. Mater. Electron. 17 2006 443 451
22. S. Yugo, T. Kimura, H. Kanai, Science and Technology of new diamond (1990) 119-123.
23. E. Anger, A. Gicquel, Z.Z. Wang, and M.F. Ravet Diamond Relat. Mater. 4 1995 759 764
24. A.V. Sumant, P.U.P.A. Gilbert, D.S. Grierson, A.R. Konicek, M. Abrecht, J.E. Butler, T. Feygelson, S.S. Rotter, and R.W. Carpick Diamond Relat. Mater. 16 2007 718 724
25. L.C. Nistor, J.V. Landuyt, V.G. Ralchenko, A.A. Smolin, K.G. Korotushenko, and E.D. Obraztsova J. Mater. Res. 12 1997 2533 2542
26. K. Suzuki, A. Sawabe, and T. Inuzuka Jpn. J. Appl. Phys. 29 1990 153 157
27. A. Hoffman, and A. Laikhtman J. Phys. Condens. Matter 18 2006 1517 1546
28. S.A. Catledge, Y.K. Vohra, and P.B. Mirkarimi J. Phys. D Appl. Phys. 38 2005 1410 1414
29. A.C. Ferrari, and J. Robertson Phys. Rev. B 63 2001 121405
30. P.W. May, M.N.R. Ashfold, and Yu.A. Mankelevich J. Appl. Phys. 101 2007 053115
31. P.T. Joseph, L.J. Chen, N.H. Tai, U. Palnitkar, H.F. Cheng, and I.N. Lin J. Nanosci. Nanotechnol. 8 2008 4198 4201
32. B.D. Cullity Elements of X-ray Diffraction third ed. 1978 Addison-Wesley California
33. K. Wu, E.G. Wang, Z.X. Cao, Z.L. Wang, and X. Jiang J. Appl. Phys. 88 2000 2967 2974
34. H.Y. Zhou, R.J. Zhan, X.D. Zhu, X.H. Wen, and X. Chen Nanotechnology 15 2004 1609 1612
35. H.-J. Lee, H.T. Jeon, W.-S. Lee, (under revision, J. Phys. Chem. C (2010) Manuscript ID: jp-2009-10862v.R1).