Silicon-on-Diamond - An engineered substrate for electronic applications

Diamond and Related Materials

Volumn 15, Issue 2-3, 2006, Pages 248-253

  Aleksov, A ^a   Gobien, J M ^a   Li, X ^a   Prater, J T ^b   Sitar, Z ^a  

^a North Carolina State University   (United States)

^b U S ARMY RESEARCH OFFICE   (United States)

Author keywords

Devices; Electronic properties; Silicon on Diamond (SOD); Thermal properties

Indexed keywords

DIAMONDS; FINITE ELEMENT METHOD; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; THERMAL INSULATING MATERIALS;

DEVICES; INTEGRATION DENSITY; SILICON-ON-DIAMOND (SOD);

ULSI CIRCUITS;

EID: 33644881936     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.09.012     Document Type: Article

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