Structural studies of diamond thin films grown from dc arc plasma

Journal of Materials Research

Volumn 12, Issue 10, 1997, Pages 2533-2542

  Nistor, L C ^a,c   Van Landuyt, J ^a   Ralchenko, V G ^b   Smolin, A A ^b   Korotushenko, K G ^b   Obraztsova, E D ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

^c NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL STRUCTURE; DEPOSITION; ELECTRIC ARCS; FILM GROWTH; HYDROGEN; METHANE; PLASMA APPLICATIONS; SILICON WAFERS; STACKING FAULTS; THIN FILMS; TWINNING;

DIRECT CURRENT ARC DISCHARGES;

DIAMOND FILMS;

EID: 0031251618     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0336     Document Type: Article

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