SCOPUS 정보 검색 플랫폼

Journal of Micromechanics and Microengineering

Volumn 5, Issue 3, 1995, Pages 257-264

A micromachined, single-crystal silicon, tunable resonator

(2) Yao, J J a MacDonald, N C a

a Cornell Univ ^* (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY TUNING; LINEAR TUNING RANGE; THIRD DIMENSION EXCITATION; TUNABLE RESONATORS;

ELECTRIC EXCITATION; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SILICON SENSORS; SINGLE CRYSTALS; VLSI CIRCUITS;

RESONATORS;

EID: 0029378084 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/5/3/009 Document Type: Article

Times cited : (64)

References (30)

1
- 0026374790
- (1991) , pp. 529-532
- Zook, JD¹ Burns, DW² Guckel, H³ Sniegowski, JJ⁴ Engelstad, RL⁵ Feng, Z⁶

2
- 0025531540
- (1990) , pp. 9-12
- Sniegowski, JJ¹ Guckel, H² Christenson, TR³

3
- 0026397814
- (1991) , pp. 664-667
- Petersen, K¹ Pourahmadi, F² Brown, J³ Parsons, P⁴ Skinner, M⁵ Tudor, J⁶

4
- 0026925929
- (1992) Sensors Actuators , vol.34 A , Issue.3 , pp. 201-209
- Dufour, M¹ Delaye, MT² Michel, F³ Danel, JS⁴ Diem, B⁵ Delapierre, G⁶

5
- 0022703335
- Resonant-microbridge vapor sensor
- (1986) IEEE Transactions on Electron Devices , vol.33 , Issue.4 , pp. 499-506
- Howe, RT¹ Muller, RS²

6
- 4243097296
- (1980) Phys. Rev. Lett. , vol.44 , Issue.22 , pp. 1461-1466
- Pindak, R¹ Bishop, DJ² Sprenger, WO³

7
- 6144225993
- (1982) Phys. Rev. Lett. , vol.48 , Issue.3 , pp. 173-177
- Pindak, R¹ Sprenger, WO² Bishop, DJ³ Osheroff, DD⁴ Goodby, JW⁵

8
- 5244269729
- (1984) Phys. Rev. Lett. , vol.53 , Issue.22 , pp. 2137-2140
- Kleiman, RN¹ Bishop, DJ² Pindak, R³ Taborek, P⁴

9
- 0000875889
- (1978) Phys. Rev. Lett. , vol.40 , Issue.26 , pp. 1727-1730
- Bishop, DJ¹ Reppy, JD²

10
- 0026997983
- (1992) , pp. 153-156
- Guckel, H¹ Rypstat, C² Nesnidal, M³ Zook, JD⁴ Burns, DW⁵ Arch, DK⁶

11
- 0025698107
- (1990) Sensors Actuators , vol.21 A , pp. 303-307
- MacDonald, GA¹

12
- 0041894265
- The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate
- (1968) IBM Journal of Research and Development , pp. 113-118
- Wilfinger, RJ¹ Bardell, PH² Chhabra, DS³

13
- 0024769661
- (1989) Sensors Actuators , vol.20 , Issue.1-2 , pp. 25-32
- Tang, WC¹ Nguyen, T-CH² Howe, RT³

14
- 0024764734
- (1989) Sensors Actuators , vol.20 , Issue.1-2 , pp. 143-151
- Putty, MW¹ Chang, S-C² Howe, RT³ Robinson, AL⁴ Wise, KD⁵

15
- 0025698152
- (1990) Sensors Actuators , vol.21 A , pp. 346-351
- Guckel, H¹ Sniegowski, JJ² Christenson, TR³ Raissi, F⁴

16
- 0000364618
- (1985) Rev. Sci. Instrum. , vol.56 , Issue.11 , pp. 2088-2091
- Kleiman, RN¹ Kaminsky, GK² Reppy, JD³ Pindak, R⁴ Bishop, DJ⁵

17
- 0025698092
- (1990) Sensors Actuators , vol.21 A , pp. 323-327
- Buser, RA¹ de Rooij, NF²

18
- 0027270688
- (1993) , pp. 184-188
- Mihailovich, RE¹ Zhang, ZL² Shaw, KA³ MacDonald, NC⁴

19
- 0024771916
- (1989) Sensors Actuators , vol.20 , Issue.1-2 , pp. 171-177
- Clayton, LD¹ Eernisse, EP² Ward, RW³ Wiggins, RB⁴

20
- 84968202623
- (1991)
- McMillan, JA¹ Yao, JJ² Arney, SC³ MacDonald, NC⁴

21
- 84968199014
- (1993)
- McMillan, JA¹ MacDonald, NC²

22
- 84968044605
- (1993)
- Yao, JJ¹ MacDonald, NC²

23
- 84968198985
- (1994)
- Yao, JJ¹

24
- 84968198983
- (1994) Bull. Am. Phys. Soc. , vol.39 , pp. 508

25
- 0026837056
- (1992) J. Microelectromechanical Syst. , vol.1 , Issue.1 , pp. 14-22
- Yao, JJ¹ Arney, SC² MacDonald, NC³

26
- 84968229340
- (1993) , pp. 767-769
- Fan, LS¹ Crawforth, L²

27
- 0026382037
- (1991) , pp. 205-208
- Pratt, RI¹ Johnson, GC² Howe, RT³ Chang, JC⁴

28
- 84968059533
- (1968)
- Woodson, HH¹ Melcher, JR²

29
- 84968238507
- (1992) , pp. 25-33
- Yao, JJ¹ MacDonald, NC² Arney, SC³

30
- 0028336335
- (1994) Sensors Actuators , vol.40 A , Issue.1 , pp. 77-84
- Yao, JJ¹ Arney, SC² MacDonald, NC³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.