SCOPUS 정보 검색 플랫폼

Journal of Micromechanics and Microengineering

Volumn 5, Issue 3, 1995, Pages 257-264

A micromachined, single-crystal silicon, tunable resonator

(2) Yao, J J a MacDonald, N C a

a Department of Molecular Biology and Genetics (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY TUNING; LINEAR TUNING RANGE; THIRD DIMENSION EXCITATION; TUNABLE RESONATORS;

ELECTRIC EXCITATION; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SILICON SENSORS; SINGLE CRYSTALS; VLSI CIRCUITS;

RESONATORS;

EID: 0029378084 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/5/3/009 Document Type: Article

Times cited : (64)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.