Linear and nonlinear tuning of parametrically excited MEMS oscillators

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 310-318

  DeMartini, Barry E ^a   Rhoads, Jeffrey F ^b   Turner, Kimberly L ^a   Shaw, Steven W ^b   Moehlis, Jeff ^a  

^a University of California   (United States)

^b Michigan State University   (United States)

Author keywords

Electrostatic; Noninterdigitated combrives; Nonlinear; Parametric resonance; Tuning

Indexed keywords

ACTUATORS; ELECTROSTATICS; OSCILLATORS (MECHANICAL); RESONANCE; TUNING;

LINEAR TUNING SCHEME; MEMS OSCILLATORS; NONINTERDIGITATED COMBDRIVES;

MEMS;

EID: 34147183816     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.892910     Document Type: Article

References (21)

1. D. Rugar and P. Grutter, "Mechanical parametric amplification and thermomechanical noise squeezing," Phys. Rev. Lett., vol. 67, no. 6, pp. 699-702, 1991.
2. K. Turner, S. Miller, P. Hartwell, N. MacDonald, S. Strogatz, and S. Adams, "Five parametric resonances in a microelectromechanical system," Nature, vol. 396, pp. 149-152, 1998.
3. W. Zhang, R. Baskaran, and K. Turner, "Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor," Sens. Actuators A, Phys., vol. 102, no. 1-2, pp. 139-150, 2002.
4. S. Adams, F. Bertsch, and N. MacDonald, "Independent tuning of linear and nonlinear stiffness coefficients," J. Microelectromech. Syst.i], vol. 7, no. 2, pp. 172-180, 1998.
5. M. Napoli, W. Zhang, K. Turner, and B. Bamieh, "Characterization of electrostatically coupled microcantilevers," J. Microelectromech. Syst.i], vol. 14, no. 2, pp. 295-304, 2005.
6. M.-F. Yu, G. Wagner, R. Ruoff, and M. Dyer, "Realization of parametric resonances in a nanowire mechanical system with nanomanipulation inside a scanning electron microscope," Phys. Rev. B, vol. 66, p. 073406, 2002.
7. A. H. Nayfeh and D. T. Mook, Nonlinear Oscillations. New York: Wiley-Interscience, 1977.
8. S. Shaw, K. Turner, J. Rhoads, and R. Baskaran, "Parametrically excited MEMS-based filters," in Proc. IUTAM Symp. Chaotic Dyn. Contr. Syst. Process., 2003, vol. 122, pp. 137-146.
9. J. Rhoads, S. Shaw, K. Turner, and R. Baskaran, "Tunable microelectromechanical filters that exploit parametric resonance," J. Vibration Acoust., vol. 127, no. 5, pp. 423-430, 2005.
10. W. Zhang, R. Basharan, and K. Turner, "Tuning the dynamic behavior of parametric resonance in a micromechanical oscillator," Appl. Phys. Lett., vol. 82, no. 1, pp. 130-132, 2003.
11. T. Remtema and L. Lin, "Active frequency tuning for micro resonators by localized thermal stressing effects," Sens. Actuators A, Phys., vol. 91, no. 3, pp. 326-332, 2001.
12. K. Wang, A. Wong, W. Hsu, and C. Nguyen, "Frequency trimming and Q-factor enhancement of micromechanical resonators via localized filament annealing," in Proc. Int. Conf. Solid-State Sens. Actuators (Transducers 97), 1997, pp. 109-112.
13. R. Syms, "Electrothermal frequency tuning of folded and coupled vibrating micromechanical resonators," J. Microelectromech. Syst. vol. 7, no. 2, pp. 164-171, 1998.
14. A. Dec and K. Suyama, "Micromachined varactors with wide tuning range," IEEE Trans. Microwave Theory Tech., vol. 46, no. 12, pp. 2587-2596, 1998.
15. J. Zou, C. Liu, J. Schutt-Aine, J. Chen, and S. Kang, "Development of a wide tuning range MEMS tunable capacitor for wireless communication systems," in Proc. IEEE Int. Electron Devices Meeting, 2000, pp. 403-406.
16. J. Yao, S. Park, and J. DeNatale, "High tuning ratio MEMS based tunable capacitors for RF communications applications," in Tech. Dig. Solid-State Sens. Actuators Workshop, Hilton Head Island, SC, 1998, pp. 124-127.
17. Y. Oh, B. Lee, S. Baek, H. Kim, and J. K. S. K. C. Song, ""A surface-micromachined tunable vibratory gyroscope," in Proc. IEEE 10th Annu. Int. Microelectromech. Systems Workshop, Nagoya, Japan, 1997, pp. 272-277.
18. J. Rhoads, S. Shaw, K. Turner, J. Moehlis, B. DeMartini, and W. Zhang, "Generalized parametric resonance in electrostatically-actuated microelectromechanical oscillators," J. Sound Vibration, vol. 296, pp. 797-829, 2006.
19. R. Zounes and R. Rand, "Subharmonic resonance in the non-linear Mathieu equation," Int. J. Non-linear Mech., vol. 37, pp. 43-73, 2002.
20. K. Turner, P. Hartwell, and N. MacDonald, "Multi-dimensional MEMS motion characterization using laser vibrometry," in Proc. 10th Int. Conf. Solid-State Sens. Actuators (Transducers 1999), 1999, pp. 1144-1147.
21. B. DeMartini, J. Moehlis, K. Turner, J. Rhoads, S. Shaw, and W. Zhang, "Modeling of parametrically excited microelectromechanical oscillator dynamics with application to filtering," in Proc. IEEE Sensor Conf. Irvine, CA, 2005, pp. 345-348.