Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM

Journal of Micromechanics and Microengineering

Volumn 18, Issue 8, 2008, Pages

  Shao, L C ^a   Wong, C L ^a   Palaniapan, M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL RESONATORS; ELECTRIC NETWORK ANALYSIS; ELECTRON BEAM LITHOGRAPHY; IMAGING TECHNIQUES; NATURAL FREQUENCIES; NONMETALS; OPTICAL DESIGN; SECONDARY EMISSION; SILICON; UNCERTAINTY ANALYSIS; VIBRATIONS (MECHANICAL);

BEAM LENGTH; BEAM WIDTHS; CHARACTERIZATION METHODS; CLAMPED-CLAMPED BEAM; COMB DRIVES; DESIGN GUIDELINES; DEVICE DIMENSIONS; DEVICE PERFORMANCES; DIRECT IMAGING; IF THERE ARE; MICRO-MECHANICAL; NON-LINEAR PROPERTIES; NON-LINEARITIES; RESONANT FREQUENCIES; SCANNING ELECTRON MICROSCOPY (SEM); SILICON-ON -INSULATOR; THEORETICAL ANALYSIS; VIBRATION AMPLITUDES;

RESONATORS;

EID: 49749122113     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/8/085019     Document Type: Article

References (24)

1. Yongchul A, Guckel H and Zook J D 2001 Capacitive microbeam resonator design J. Micromech. Microeng. 11 70-80
2. Pourkamali S, Abdolvand R, Ho G K and Ayazi F 2004 Electrostatically coupled micromechanical beam filters Proc. MEMS 2004 pp 584-7
3. Greywall D S 2005 Sensitive magnetometer incorporating a high-Q nonlinear mechanical resonator Meas. Sci. Technol. 16 2473-82
4. Mestrom R M C, Fey R H B, van Beek J T M, Phan K L and Nijmeijer H 2008 Modeling the dynamics of a MEMS resonator: simulations and experiments Sensors Actuators A 142 306-15
5. Discera Inc 2008 http://www.discera.com/
6. Kaajakari V, Mattila T, Oja A and Seppa H 2004 Nonlinear limits for single-crystal silicon microresonators J. Microelectromech. Syst. 13 715-24
7. Lee T H 1998 The Design of CMOS Radio-frequency Integrated Circuits (Cambridge: Cambridge University Press)
8. Shao L C, Palaniapan M and Tan W W 2008 The nonlinearity cancellation phenomenon in micromechanical resonators J. Micromech. Microeng. 18 065014
9. Lee S and Nguyen C T C 2004 Phase noise amplitude dependence in self limiting wine-glass disk oscillators Proc. Hilton Head 2004: A Solid State Sensor, Actuator and Microsystems Workshop (South Carolina)
10. Kaajakari V, Koskinen J K and Mattila T 2005 Phase noise in capacitively coupled micromechanical oscillators IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52 2322-31
11. Clark J R, Hsu W T and Nguyen C T C 2001 Measurement techniques for capacitively-transduced VHF-to-UHF micromechanical resonators Proc. Transducers '01 pp 1118-21
12. Wong W K and Palaniapan M 2006 Phonon-mediated characterization of microelectromechanical resonators Appl. Phys. Lett. 89 064102
13. Vignola J F, Liu X, Morse S F, Houston B H, Bucaro J A, Marcus M H, Photiadis D M and Sekaric L 2002 Characterization of silicon micro-oscillators by scanning laser vibrometry Rev. Sci. Instrum. 73 3584-8
14. Lavigne G F and Miller S L 1998 A performance analysis system for MEMS using automated imaging methods Proc. IEEE Int. Test Conf. pp 442-7
15. Wong C L and Wong W K 2007 In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy Sensors Actuators A 138 167-78
16. Landau L D and Lifshitz E M 1999 Mechanics 3rd edn (Oxford, UK: Butterworth-Heinemann)
17. Bannon F D, Clark J R and Nguyen C T C 2000 High-Q HF microelectromechanical filters J. Solid-State Circuits 35 512-26
18. Tang W C, Nguyen T C H and Howe R T 1989 Laterally driven polysilicon resonant microstructures Sensors Actuators 20 25-32
19. Shao L C, Palaniapan M, Tan W W and Khine L 2008 Nonlinearity in micromechanical free-free beam resonators: modeling and experimental verification J. Micromech. Microeng. 18 025017
20. Young W C and Budynas R G 2002 Roark's Formulas for Stress and Strain 7th edn (New York: McGraw-Hill)
21. Miller K, Cowen A, Hames G and Hardy B 2004 SOIMUMPs Design Handbook (MEMSCAP)
22. Hao Z L, Erbil A and Ayazi F 2003 An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations Sensors Actuators A 109 156-64
23. Lin Y W, Li S S, Xie Y, Ren Z Y and Nguyen C T C 2005 Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps Proc. Joint IEEE Int. Frequency Control/Precision Time & Time Interval Symp. pp 128-34
24. Yang J, Ono T and Esashi M 2002 Energy dissipation in submicrometer thick single-crystal silicon cantilevers J. Microelectromech. Syst. 11 775-83