Nonlinear characterization of electrostatic MEMS resonators

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2006, Pages 209-212

  Agarwal, Manu ^a   Park, Kwan Kyu ^a   Candler, Rob N ^a,b   Kim, Bongsang ^a   Hopcroft, Matthew A ^a   Chandorkar, Saurabh A ^a   Jha, Chandra M ^a   Melamud, Renata ^a   Kenny, Thomas W ^a   Murmann, Boris ^a  

^a STANFORD UNIVERSITY   (United States)

^b BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MEMS; NONLINEAR ANALYSIS; QUARTZ CRYSTAL MICROBALANCES;

ELECTROSTATIC MEMS RESONATORS; ENCAPSULATED MICROMECHANICAL RESONATOR; QUARTZ CRYSTAL RESONATORS;

CRYSTAL RESONATORS;

EID: 39049112987     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2006.275380     Document Type: Conference Paper

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