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Volumn , Issue , 2006, Pages 209-212

Nonlinear characterization of electrostatic MEMS resonators

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; MEMS; NONLINEAR ANALYSIS; QUARTZ CRYSTAL MICROBALANCES;

EID: 39049112987     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2006.275380     Document Type: Conference Paper
Times cited : (42)

References (17)
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  • 2
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  • 3
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  • 4
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    • Hydrogen diffusion and pressure control of encapsulated MEMS resonators
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    • R. N. Candler et al., "Hydrogen diffusion and pressure control of encapsulated MEMS resonators," presented at Solid-State Sensors, Actuators and Microsystems, 2005.
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    • Candler, R.N.1
  • 5
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    • Frequency stability of wafer-scale encapsulated MEMS resonators
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    • Kim, B.1
  • 6
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    • Low phase noise array-composite micromechanical wine-glass disk oscillator
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    • Lin, Y.-W.1
  • 7
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    • Kaajakari, V.1
  • 8
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    • Micromechanical "hollow-disk" ring resonators
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  • 9
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    • 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.