Experimental validation of hardening and softening resonances in a clamped-clamped beam MEMS resonator

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 812-815

  Mestrom, R M C ^a   Fey, R H B ^a   Phan, K L ^b   Nijmeijer, H ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

experimental validation; MEMS resonator; Multiphysics modeling; nonlinear dynamic behavior

Indexed keywords

ANCHOR LOSS; CLAMPED-CLAMPED BEAM; DESIGN OPTIMIZATION; ELECTROSTATIC EFFECT; EXCITATION PARAMETERS; EXPERIMENTAL APPROACHES; EXPERIMENTAL VALIDATIONS; FIRST-PRINCIPLES; MEMS RESONATORS; MULTI-PHYSICS MODELING; NONLINEAR BEHAVIOR; NONLINEAR DYNAMIC BEHAVIORS; NONLINEAR EFFECT; QUANTITATIVE CORRESPONDENCE; REDUCED ORDER MODELS; THERMOELASTIC DAMPING;

HARDENING; MEMS; OPTIMIZATION; RESONATORS; SIMULATORS; THERMOELASTICITY;

MICROELECTROMECHANICAL DEVICES;

EID: 71849093831     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.202     Document Type: Conference Paper

References (11)

1. Nguyen C.-C. MEMS Technology for Timing and Frequency Control. IEEE Trans Ultrason Ferr 54 2 (2007) 251-270
2. Kaajakari V., Mattila T., Oja A., and Seppä H. Nonlinear Limits for Single-Crystal Silicon Micro-resonators. J Microelectromech Syst 13 (2004) 715-724
3. Mestrom R.M.C., Fey R.H.B., van Beek J.T.M., Phan K.L., and Nijmeijer H. Modelling the dynamics of a MEMS resonator: Simulations and experiments. Sens Actuat A 142 (2008) 306-315
4. Shao L.C., Wong C.L., and Palaniapan M. Study of the nonlinearities in micromechanical clamped-clamped beam resonators using stroboscopic SEM. J Micromech Microeng 18 (2008) 085019(7pp)
5. Nowinsky J.L. Theory of thermoelasticity with applications (1978), Slijthof & Noordhoff International Publishers, the Netherlands
6. Lifshitz R., and Roukes M.L. Thermoelastic damping in micro- and nanomechanical systems. Physical Review B 61 8 (2000) 5600-5609
7. Osterberg P.M., and Senturia S.D. M-Test: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures. J Microelectromech Syst 6 2 (1997) 107-118
8. Krylov S., Harari I., and Cohen Y. Stabilization of Electrostatically Actuated Microstructures Using Parametric Excitation. J Micromech Microeng 15 6 (2005) 1188-1204
9. Meirovitch L. Fundamentals of Vibrations (2001), McGraw-Hill, London
10. Doede l E., Champneys A.R., Fairgrieve T.F., Kuznetsov Y.A., Sandstede B., and WANG X. AUTO97: Continuation and Bifurcation Software for Ordinary Differential Equations (with HomCont), Technical Report. Concordia University (1998)
11. Thoms en J.J. Vibrations and Stability; Advanced Theory, Analysis and Tools (2003), Springer Verlag, Berlin 2nd edition