Chapter 5 Etching of III Nitrides

Semiconductors and Semimetals

Volumn 50, Issue C, 1997, Pages 103-126

  Pearton, S J ^a   Shul, R J ^b  

^a University of Florida   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

III-NITRIDE;

ETCHING;

EID: 77956706439     PISSN: 00808784     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S0080-8784(08)63086-0     Document Type: Article

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