Room-temperature photoenhanced wet etching of GaN

Applied Physics Letters

Volumn 68, Issue 11, 1996, Pages 1531-1533

  Minsky, M S ^a   White, M ^a   Hu, E L ^a  

^a University of California at Santa Barbara   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; ETCHING; HYDROCHLORIC ACID; METALLORGANIC CHEMICAL VAPOR DEPOSITION; POTASSIUM COMPOUNDS; REDOX REACTIONS; SAPPHIRE; SOLID STATE LASERS;

ELECTROCHEMICAL CELLS; ETCH RATES; GALLIUM NITRIDE; HELIUM CADMIUM LASERS; PHOTOELECTROCHEMICAL ETCHING; POTASSIUM HYDROXIDE; WET ETCHING;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0030103958     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115689     Document Type: Article

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