Stages in the interaction of deuterium atoms with amorphous hydrogenated carbon films: Isotope exchange, soft-layer formation, and steady-state erosion

Journal of Applied Physics

Volumn 108, Issue 4, 2010, Pages

  Oehrlein, G S ^a,b   Schwarz Selinger, T ^a   Schmid, K ^a   Schluter M ^a   Jacob, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

A-C:H FILMS; A-CARBON; AMORPHOUS HYDROGENATED CARBON FILMS; AREAL DENSITIES; ATOM BEAMS; BONDED HYDROGEN; CONSTANT THICKNESS; CROSS SECTION; EFFECTIVE CROSS SECTIONS; FASTER RATES; FLUENCES; H-ABSTRACTION; IN-SITU; ION BEAM ANALYSIS; ISOTOPE EXCHANGE; ISOTOPIC EXCHANGE; LAYER FORMATION; NEAR SURFACE REGIONS; RATE-LIMITING STEPS; REAL TIME; SOFT LAYERS; SUBSTRATE TEMPERATURE; VACUUM CHAMBERS;

ABSTRACTING; AMORPHOUS CARBON; AMORPHOUS FILMS; ATOMS; D REGION; DEUTERIUM; ELLIPSOMETRY; EROSION; HYDROGEN; HYDROGEN BONDS; HYDROGENATION;

CARBON FILMS;

EID: 77956331909     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3474988     Document Type: Conference Paper

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