Surface cleaning by plasma-enhanced desorption of contaminants (PEDC)

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 240-244

  Kruger P ^a   Knes, R ^a   Friedrich, J ^b  

^a Plasma finish GmbH   (Germany)

^b BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Cleaning; Glass; Metal

Indexed keywords

ADHESION; CARBON; DESORPTION; FIBER REINFORCED PLASTICS; GLASS FIBERS; IMPURITIES; METALLIZING; OPTICAL PROPERTIES; OXIDATION; OXIDES; PLASMA APPLICATIONS; SHEET METAL;

PLASMA-ENHANCED DESORPTION OF CONTAMINANTS (PEDC);

SURFACE CLEANING;

EID: 0033077330     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00777-4     Document Type: Article

References (7)

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7. J. Gähde, H. Wittrich, E. Schlosser, J. Friedrich, G. Kaiser, DD-WP 106 052, 1972.