The prediction of suction failures in MEMS

IEEE Transactions on Device and Materials Reliability

Volumn 3, Issue 4, 2003, Pages 167-172

  Van Spengen, W Merlijn ^a,b   Puers, Robert ^b   De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

MEMS; Microsystems; Reliability; Statistical methods; Stiction

Indexed keywords

ACCELEROMETERS; INTERFACIAL ENERGY; MIRRORS; RELIABILITY; STATISTICAL METHODS; STICTION; SWITCHES;

MEMS; MICROSYSTEMS; SURFACE INTERACTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 3042808458     PISSN: 15304388     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDMR.2003.820295     Document Type: Article

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