Elastic modulus study of gold thin film for use as an actuated membrane in a superconducting RF MEM switch

IEEE Transactions on Applied Superconductivity

Volumn 15, Issue 2 PART I, 2005, Pages 980-983

  Bogozi, Albert ^a   Datye, Amit V ^a   Brzhezinskaya, Mariya ^a   Hijazi, Yazan S ^a   Martinez, Jose ^a   Noel, Julien ^a   Wu, Kuang H ^a   Vlasov, Yuriy A ^a,b   Larkins Jr , Grover L ^a  

^a FLORIDA INTERNATIONAL UNIVERSITY   (United States)

^b IOFFE INSTITUTE   (Russian Federation)

Author keywords

Microwave devices; Microwave switches; Modeling; Superconducting switches

Indexed keywords

ELASTIC MODULI; ELASTICITY; ELECTRIC POTENTIAL; GOLD; HIGH TEMPERATURE SUPERCONDUCTORS; JOSEPHSON JUNCTION DEVICES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NUMERICAL METHODS; PERMITTIVITY; SUPERCONDUCTING DEVICES; SUPERCONDUCTING TRANSITION TEMPERATURE; SWITCHES; WAVEGUIDES; YTTRIUM COMPOUNDS;

ELECTROSTATIC FORCE; MICROWAVE SWITCHES; MODELING; SUPERCONDUCTING SWITCHES;

THIN FILMS;

EID: 22044449199     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2005.850157     Document Type: Conference Paper

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