Adhesion experiments using an AFM-Parameters of influence

Applied Surface Science

Volumn 257, Issue 1, 2010, Pages 48-55

  Dos Santos Ferreira, Olavio ^a   Gelinck, Edwin ^b   De Graaf, Dennis ^b   Fischer, Hartmut ^b  

^a ASML   (Netherlands)

^b TNO   (Netherlands)

Author keywords

Abrasion tip; Adhesion; AFM; Contact area; Contact time; FIB; Tip modification

Indexed keywords

ABRASION; ATOMIC FORCE MICROSCOPY; ION BEAMS; MATERIALS TESTING;

ADHESION FORCES; ADHESION MEASUREMENT; CONTACT AREAS; CONTACT FORCES; CONTACT TIME; EXPERIMENTAL PROTOCOLS; QUANTITATIVE RESULT; TIP MODIFICATION;

ADHESION;

EID: 77955512526     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.06.031     Document Type: Article

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