Friction and pull-off forces on submicron-size asperities

Wear

Volumn 216, Issue 2, 1998, Pages 115-122

  Ando, Yasuhisa ^a   Ino, Jiro ^b,c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b CHUO UNIVERSITY   (Japan)

^c KUBOTA CORPORATION   (Japan)

Author keywords

AFM; Focused ion beam; Friction force; JKR theory; Pull off force; Radius of curvature

Indexed keywords

ATOMIC FORCE MICROSCOPY; FORCE MEASUREMENT; ION BEAMS; SILICON WAFERS; SURFACE ROUGHNESS; TRIBOLOGY;

FOCUSED ION BEAMS; PULL OFF FORCES;

FRICTION;

EID: 0032050490     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(97)00158-0     Document Type: Article

References (15)

1. H. Ota, T. Oda, M. Kobayashi, Development of coil winding process for radial gap type electromagnetic micro-rotating machine, Proceedings of IEEE Micro Electro Mechanical Systems, 1995, pp. 197-202.
2. T. Yu-Chong, F. Long-Sheng, R.S. Muller, IC-processed micromotors: design, technology, and testing, Proceedings of IEEE Micro Electro Mechanical Systems, 1989, pp. 1-6.
3. S.R. Burgett, K.S. Piter, R.S. Fearing, Three dimensional structures made with micro fabricated hinges, Micromechanical Systems, DSC 40 (1992) 1-11.
4. Y. Ando, Y. Ishikawa, T. Kitahara, Characteristics of friction in small contact surface, Japanese Journal of Tribology 38 (1993) 1225-1236.
5. Y. Ando, Y. Ishikawa, T. Kitahara, Friction characteristics and adhesion force under low normal load, Transactions of the ASME Journal of Tribology 117 (1995) 569-574.
6. J.N. Israelachvili, D. Tabor, The measurement of van der Waals dispersion forces in the range 1.5 to 130 nm, Proceedings of the Royal Society of London A 331 (1972) 19-38.
7. K.L. Johnson, K. Kendall, A.D. Roberts, Surface energy and the contact of elastic solid, Proceedings of the Royal Society of London A 324 (1971) 301-313.
8. B.V. Derjaguin, V.N. Muller, Yu.P. Toporov, Effect of contact deformations on the adhesion of particles, Journal of Colloid and Interface Science 53 (1975) 314-325.
9. J. Skinner, N. Gane, Sliding friction under negative load, Journal of Physics D 5 (1972) 2087-2094.
10. K.N.G. Fuller, D. Tabor, The effect of surface roughness on the adhesion of elastic solids, Proceedings of the Royal Society of London A 345 (1975) 327-342.
11. K.E. Petersen, Silicon as a mechanical material, Proceedings of the IEEE 70 (1982) 420-457.
12. H, Yoshizawa, Y. Chen, J.N. Israelachvili, Fundamental mechanisms of interfacial friction, Journal of Physical Chemistry 97 (1993) 4128-4140.
13. J.N. Israelachvili, Intermolecular Surface Forces, Academic Press, London, 1985.
14. J. Li, M. Hattori, Heat of immersion of silicon nitride, Thermochimica Acta 88 (1985) 267-272.
15. K. Hermansson, U. Lindberg, B. Hök, G. Palmskog, Wetting properties of silicon surfaces, Transducers '91, Proceedings of the International Conference on Solid-State Sensors and Actuators, 1991, pp. 193-196.