Preparation of Al doped ZnO thin films as a function of substrate temperature by a facing target sputtering system

Journal of Ceramic Processing Research

Volumn 8, Issue 1, 2007, Pages 56-58

  Keum, Min Jong ^a   Cho, Bum Jin ^a   Choi, Hyung Wook ^a   Park, Sang Joon ^a   Kim, Kyung Hwan ^a  

^a Gachon University College of Medicine   (South Korea)

Author keywords

AZO; Facing target sputtering; Resistivity; TCO

Indexed keywords

EID: 33947597262     PISSN: 12299162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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