Comparison of the properties for ZnO:Al films deposited on polyimide and glass substrates

Materials Science and Engineering: B

Volumn 90, Issue 1-2, 2002, Pages 50-54

  Hao, Xiao Tao ^a   Ma, Jin ^a   Zhang, De Heng ^a   Yang, Ying Ge ^a   Ma, Hong Lei ^a   Cheng, Chuan Fu ^b   Liu, Xiang Dong ^a  

^a SHANDONG UNIVERSITY   (China)

^b SHANDONG NORMAL UNIVERSITY   (China)

Author keywords

Aluminum doped zinc oxide film; Organic substrate; Transparent conductive film

Indexed keywords

ALUMINUM; CRYSTAL ORIENTATION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; GLASS; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; POLYIMIDES; SPUTTER DEPOSITION; SUBSTRATES; THICK FILMS; ZINC OXIDE;

ORGANIC SUBSTRATES;

CONDUCTIVE FILMS;

EID: 0037034687     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00828-5     Document Type: Article

References (12)