Compact low-voltage operation micromirror based on high-vacuum seal technology using metal can

Journal of Microelectromechanical Systems

Volumn 19, Issue 4, 2010, Pages 927-935

  Chu, Hoang Manh ^a   Tokuda, Takayuki ^b,c   Kimata, Masafumi ^b   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

^c KUBOTA CORPORATION   (Japan)

Author keywords

Air friction; low voltage operation micromirror; nonevaporable getter (NEG); TO8 metal can

Indexed keywords

AIR FRICTION; LOW VOLTAGE OPERATION; MICRO MIRROR; NON-EVAPORABLE GETTERS; TO8 METAL CAN;

ATMOSPHERIC PRESSURE; DIES; FABRICATION; FRICTION; GETTERS; METALS; MIRRORS; NATURAL FREQUENCIES; OPTICAL ROTATION; PACKAGING; PLASMA ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TRIBOLOGY; VACUUM;

SEALS;

EID: 77955415821     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2055545     Document Type: Article

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