Vacuum operation of comb-drive micro display mirrors

Journal of Micromechanics and Microengineering

Volumn 19, Issue 10, 2009, Pages

  Manh, Chu Hoang ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; ATMOSPHERIC AIR; COMB FINGERS; COMBDRIVE; ENVIRONMENTAL PRESSURES; FABRICATION PROCESS; HIGH FREQUENCY; IN-VACUUM; LASER SCANNING; MICRO MIRROR; MICRODISPLAYS; OPERATION CHARACTERISTIC; OPERATION VOLTAGE; QUALITY FACTORS; RESONANT FREQUENCIES; RESONANT OPERATION; ROTATION ANGLES; SCAN ANGLE; SILICON ON INSULATOR WAFERS; TORSION BAR; TYPE II;

ATMOSPHERIC ELECTRICITY; FABRICATION; NATURAL FREQUENCIES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TORSIONAL STRESS; VACUUM;

MIRRORS;

EID: 71049119460     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/10/105018     Document Type: Article

References (27)

1. Urey H 2004 MEMS scanners for display and imaging applications Proc. SPIE 5604 218-29
2. Sasaki M, Ishimori M, Song J H and Hane K 2007 Tunable vertical comb for driving micromirror realized by bending device wafer IEICE Trans. Electron. E90-C 147-8
3. Ko Y-C, Cho J-W, Mun Y-K, Jeong H-G, Choi W K, Kim J-W, Park Y-H, Yoo J-B and Lee J-H 2006 Eye-type scanning mirror with dual vertical combs for laser display Sensors Actuators A 126 218-226
4. Hirano T, Furuhata T, Gabriel K J and Fujita H 1992 Design, fabrication, and operation of submicron gap comb-drive microactuators J. Microelectromech. Syst. 1 52-9
5. Wu M, Lin H-Y and Fang W 2007 Design of novel sequential engagement vertical comb electrodes for analog micromirror IEEE Photon. Technol. Lett. 19 1586-8
6. Pandey A K and Pratap R 2008 A semi-analytical model for squeeze-film damping including rarefaction in a MEMS torsion mirror with complex geometry J. Micromech. Microeng. 18 105003
7. Ji C-H, Choi M, Kim S-C, Lee S-H, Kim S-H, Yee Y and Bu J-Uk 2006 An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame J. Micromech. Microeng. 16 1033-9
8. Tachibana H, Kawano K, Ueda H and Noge H 2009 Vacuum wafer level packaged two-dimensional optical scanner by anodic bonding 22nd IEEE MEMS pp 959-62
9. Sasaki M, Yuki S and Hane K 2007 Performance of tense thin-film torsion bar for large rotation and low-voltage driving of micromirror IEEE J. Sel. Top. Quantum Electron. 13 290-5
10. Foulgoc B L, Bourouina T, Traon O L, Bosseboeuf A, Marty F, Breluzeau C, Grandchamp J-P and Masson S 2006 Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor J. Micromech. Microeng. 16 160-8
11. Li B, Wu H, Zhu C and Liu J 1999 The theoretical analysis on damping characteristics of resonant microbeam in vacuum Sensors Actuators A 77 191-4
12. Martin M J, Houston B H, Baldwin J W and Zalalutdinov M K 2008 Damping models for microcantilevers, bridges, and torsional resonators in the free-molecular-flow regime J. Microelectromech. Syst. 17 503-11
13. Christian R G 1996 The theory of oscillating-vane vacuum gauges Vacuum 16 175-8
14. Kadar Z, Kindt W, Bossche A and Mollinger J 1996 Quality factor of torsional resonators in the low-pressure region Sensors Actuators A 55 299-303
15. Veijola T, Kuisma H and Lahdenpera J 1998 The influence of gas-surface interaction on gas-film damping in a silicon accelerometer Sensors Actuators A 66 83-92
16. Gombosi T I 1994 Gaskinetic Theory (Cambridge: Cambridge University Press)
17. Ito H and Nakazawa M 1990 An analysis of impedance-gas pressure characteristics of tuning fork typed quartz vacuum gauge-the effect of the drag force and the viscous friction of gas IEICE Trans. A 7 677-84 (in Japanese)
18. Klose T, Conrad H, Sandner T and Schenk H 2008 Fluidmechanical damping analysis of resonant micromirrors with out-of-plane comb drive Proc. COMSOL Conf. (Hannover)
19. Spiel C L, Pohl R O and Zehnder AT 2001 Normal modes of a Si.(100) double-paddle oscillator Rev. Sci. Instrum. 72 1482-91
20. Hahtela O, Chekurov N and Tittonen I 2005 Non-tilting out-of-plane mode high-Q mechanical silicon oscillator J. Micromech. Microeng. 15 1848-53
21. Yang J, Ono T and Esashi M 2001 Investigating surface stress: surface loss in ultrathin single-crystal silicon cantilevers J. Vac. Sci. Technol. B 19 551-6
22. Carr Dustin W, Evoy S, Sekaric L, Craighead H G and Parpia J M 1999 Measurement of mechanical resonance and losses in nanometer scale silicon wires Appl. Phys. Lett. 75 920-2
23. Mihailovich R E and MacDonald N C 1995 Dissipation measurements of vacuum-operated single-crystal silicon microresonators Sensors Actuators A 50 199-207
24. Prak A, Blom F R, Elwenspoek M and Lammerink T S J 1991 Q-factor and frequency shift of resonating silicon diaphragms in air Sensors Actuators A 27 691-98
25. Li W-L 2008 Squeeze film effects on dynamic performance of MEMS μ-mirrors-consideration of gas rarefaction and surface roughness Microsyst. Technol. 14 315-24
26. Minikes A, Bucher I and Avivi G 2005 Damping of a micro-resonator torsion mirror in rarefied gas ambient J. Micromech. Microeng. 15 1762-9
27. Bao M and Yang H 2007 Squeeze film air damping in MEMS Sensors Actuators A 136 3-27