A semi-analytical model for squeeze-film damping including rarefaction in a MEMS torsion mirror with complex geometry

Journal of Micromechanics and Microengineering

Volumn 18, Issue 10, 2008, Pages

  Pandey, Ashok Kumar ^a   Pratap, Rudra ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; BOUNDARY VALUE PROBLEMS; DAMPING; EXPERIMENTS; FLUID DYNAMICS; GALLIUM ALLOYS; HYDRODYNAMICS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NAVIER STOKES EQUATIONS; OPTICAL LOSSES; PLATES (STRUCTURAL COMPONENTS); TORSIONAL STRESS; VISCOSITY;

ANALYTICAL APPROACHES; ANALYTICAL MODELS; COMPACT MODELS; COMPLEX GEOMETRIES; COMPLICATED BOUNDARY CONDITIONS; COMPLICATED STRUCTURES; EFFECTIVE LENGTHS; EFFECTIVE VISCOSITIES; EFFECTIVE VISCOSITY MODELS; EMPIRICAL MODELS; FLOW REGIMES; FLUID DAMPING; GAP THICKNESSES; INTRINSIC LOSSES; MOLECULAR FLOWS; NUMERICAL SOLUTIONS; QUALITY FACTORS; RAREFACTION EFFECTS; REYNOLDS; TORSION MIRRORS; ZERO PRESSURES;

MATHEMATICAL MODELS;

EID: 58149329015     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/10/105003     Document Type: Article

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