Silicon micromechanical galvanometric scanner

Sensors and Actuators, A: Physical

Volumn 73, Issue 3, 1999, Pages 252-260

  Ferreira, L O S ^a   Moehlecke, S ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; GALVANOMETERS; MICROACTUATORS; MICROMACHINING; MIRRORS; SCANNING; SEMICONDUCTING SILICON;

MICROMECHANICAL GALVANOMETRIC SCANNERS;

MICROSENSORS;

EID: 0032639773     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00288-X     Document Type: Article

References (24)

1. Petersen K.E. Silicon torsional scanning mirror. IBM J. Res. Develop. 24:1980;631-637.
2. Petersen K.E. Silicon as a mechanical material. Proc. of the IEEE. 70:1982;420-457.
3. Gustafsson K., Hok B. A silicon light modulator. J. Phys. E. 21:1988;680-685.
4. Fischer M., Graef H., von Munch W. Electrostatically deflectable polysilicon torsional mirrors. Sensors and Actuators A. 44:1994;83-89.
5. Jaecklin V.P., Linder C., Brugger J., de Rooij N.F., Moret J.-M., Vuilleumier R. Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon, and aluminum. Sensors and Actuators A. 43:1994;269-275.
6. Kiang M.-H., Solgaard O., Lau K.Y., Muller R.S. Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning. J. Microelectromechanical Syst. 7:1998;27-37.
7. Dickensheets D.L., Kino G.S. Silicon-micromachined scanning confocal optical microscope. J. Microelectromechanical Syst. 7:1998;38-47.
8. Rossel C., Bauer P., Zech D., Hofer J., Willemin M., Keller H. Active microlevers as miniature torque magnetometers. J. Appl. Phys. 79:1996;8166-8173.
9. Judy J.W., Muller R.S. Magnetic microactuation of torsional polysilicon structures. Sensors and Actuators A. 53:1996;392-397.
10. Löchel B., Maciossek A., Quenzer H.-J., Wagner B., Engelmann G. Magnetically driven microstructures fabricated with multilayer electroplating. Sensors and Actuators A. 46-47:1995;98-103.
11. Ch.H. Ahn, M.G. Allen, A fully integrated micromagnetic actuator with a multilevel meander magnetic core, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1992, pp. 14-18.
12. K. Yanagisawa, H. Kowano, A. Tagao, An electromagnetically driven microvalve, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7-10 June 1993, pp. 102-105.
13. Hetrick R.E. A vibrating cantilever magnetic field sensor. Sensors and Actuators. 16:1989;197-207.
14. B. Wagner, W. Benecke, in: H. Reichl (Ed.), Magnetically Driven Microactuator: Design Considerations, Microsystem Technologies 90, Springer, Berlin, 1990, pp. 838-843.
15. Bassous E. Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon. IEEE Trans. Electron Devices. ED 25:1978;1178-1185.
16. Bean K.E. Anisotropic etching of silicon. IEEE Trans. Electron Devices. ED 25:1978;1185-1193.
17. Kendall D.L. A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts. J. Vac. Sci. Technol. A. 8:1990;3598-3605.
18. Wu T.H.T., Rosler R.S. Stress in PSG and nitride films as related to film properties and annealing. Solid State Technology. 35(5):1992;65-72.
19. Riethmuller W., Benecke W. Thermally excited silicon microactuators. IEEE Trans. Electron. Dev. 35:1988;758-765.
20. C.M. Harris, Shock and Vibration Handbook, 4th edn., McGraw-Hill, New York, 1995.
21. T. Kenjo, Permanent Magnet and Brushless DC Motors, Clarendon Press, 1985.
22. R.J. Roark, W.C. Young, Formulas for Stress and Strain, 6th edn., McGraw-Hill, New York, 1989.
23. W. Menz, W. Bacher, M. Harmening, A. Michel, The LIGA technique - a novel concept for microstructures and the combination with Si-technologies by injection molding, Proceedings IEEE Micro Mechanical Systems, 1991, pp. 69-73.
24. Pearson G.L., Read W.T. Jr., Feldmann W.L. Deformation and fracture of small silicon crystals. Acta Met. 5:1957;181-191.