Vacuum packaging technology for mass production of uncooled IRFPAs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7298, Issue , 2009, Pages

  Ito, Takuya ^a   Tokuda, Takayuki ^a   Kimata, Masafumi ^a   Abe, Hideyuki ^b   Tokashiki, Naotaka ^c  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b Ayumi Industry Co LTD   (Japan)

^c Miyoshi Electronics Corporation   (Japan)

Author keywords

MEMS; Micro vacuum gauge; Uncooled infrared focal plane array; Vacuum packaging

Indexed keywords

AIR MOLECULES; BATCH SIZES; FABRICATION PROCESS; HIGH-VACUUM CONDITIONS; MASS PRODUCTION; MICRO-VACUUM GAUGE; OPERATION PRINCIPLES; THERMAL CONDUCTION; UNCOOLED; UNCOOLED INFRARED FOCAL PLANE ARRAY; UNIFORM HEATING; VACUUM GAUGES; VACUUM LEVEL; VACUUM PACKAGING;

CONSTRUCTION EQUIPMENT; FOCUSING; GAGES; GRAPHITE; HEATING; INFRARED DETECTORS; INFRARED RADIATION; MACHINE TOOLS; MEMS; MICROELECTROMECHANICAL DEVICES; PRODUCTION ENGINEERING; SOLDERING; TECHNOLOGY; VACUUM GAGES; VACUUM TECHNOLOGY;

VACUUM;

EID: 69949163718     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.822707     Document Type: Conference Paper

References (7)

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