Analytical study of dual-mode thin film bulk acoustic resonators (FBARs) based on ZnO and AlN films with tilted c-axis orientation

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 57, Issue 8, 2010, Pages 1840-1853

  Qin, Lifeng ^a   Chen, Qingming ^b   Cheng, Hongbin ^a   Wang, Qing Ming ^a  

^a University of Pittsburgh   (United States)

^b KUNMING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC VELOCITY; ALN; ALN FILMS; BULK WAVES; C-AXIS ORIENTATIONS; DESIGN AND APPLICATION; DUAL MODES; ELECTROMECHANICAL COEFFICIENTS; ELECTROMECHANICAL COUPLING COEFFICIENTS; HIGH SENSITIVITY; IN-PLANE POLARIZATION; LONGITUDINAL MODES; MASS LOADINGS; MASS SENSOR; MATERIAL PROPERTY; PIEZOELECTRIC COEFFICIENT; POLARIZATION ANGLE; PURE SHEAR; RESONANT FREQUENCY SHIFT; SENSOR APPLICATIONS; SHEAR MODES; SIMULATION RESULT; THICKNESS SHEAR MODES; THIN FILM BULK ACOUSTIC RESONATOR; THIN-FILM BULK ACOUSTIC WAVE RESONATOR; TILT ANGLE; ZNO;

ACOUSTIC IMPEDANCE; ACOUSTICS; CONSTITUTIVE EQUATIONS; ELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRICITY; POLARIZATION; RESONATORS; SENSORS; THIN FILMS; ZINC OXIDE;

ACOUSTIC RESONATORS;

EID: 77955354421     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2010.1623     Document Type: Article

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