Microbalance chemical sensor based on thin-film bulk acoustic wave resonators

Applied Physics Letters

Volumn 87, Issue 17, 2005, Pages 1-3

  Benetti, M ^a   Cannata D ^a   Di Pietrantonio, F ^a   Foglietti, V ^b   Verona, E ^a  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

^b IFN CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; OPERATION FREQUENCY; QUARTZ CRYSTALS;

CRYSTALS; EVAPORATION; QUARTZ; THIN FILMS;

CHEMICAL SENSORS;

EID: 28344434375     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2112187     Document Type: Article

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