Nanoscratch-induced deformation of single crystal silicon

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 27, Issue 3, 2009, Pages 1374-1377

  Wu, Y Q ^a   Huang, H ^a   Zou, J ^a   Dell, J M ^b  

^a UNIVERSITY OF QUEENSLAND   (Australia)

^b UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; DEFORMATION; DISLOCATIONS (CRYSTALS); MONOCRYSTALLINE SILICON; NANOINDENTATION; SINGLE CRYSTALS; STACKING FAULTS; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTALLINE DEFECTS; MONOCRYSTALLINE; NANO-GRINDING; NANO-SCRATCH; NANOSCRATCHING; NORMAL LOADS; SINGLE CRYSTAL SILICON; TEM; TEM ANALYSIS; TIP RADIUS;

SILICON WAFERS;

EID: 77953682803     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3049517     Document Type: Conference Paper

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