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Volumn 47, Issue 15, 2007, Pages 2237-2245

Profile error compensation approaches for parallel nanogrinding of aspherical mould inserts

Author keywords

Aspherical surface; Compensation; Grinding; Mould insert; Profile error

Indexed keywords

ASPHERICS; ERROR ANALYSIS; ERROR COMPENSATION; MOLDS; NANOTECHNOLOGY; PROFILOMETRY;

EID: 35348909162     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijmachtools.2007.06.008     Document Type: Article
Times cited : (73)

References (17)
  • 2
    • 0025889575 scopus 로고
    • Development of productivity in aspherical precision machining with in situ metrology
    • Nishiguch T., Koizumi Y., Maeda Y., and Nagayama K. Development of productivity in aspherical precision machining with in situ metrology. Annals of the CIRP 40 1 (1991) 367-370
    • (1991) Annals of the CIRP , vol.40 , Issue.1 , pp. 367-370
    • Nishiguch, T.1    Koizumi, Y.2    Maeda, Y.3    Nagayama, K.4
  • 4
    • 14844299896 scopus 로고    scopus 로고
    • Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors
    • Cheng H.B., Feng Z.J., Cheng K., and Wang Y.W. Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors. International Journal of Machine Tools and Manufacture 45 9 (2005) 1085-1094
    • (2005) International Journal of Machine Tools and Manufacture , vol.45 , Issue.9 , pp. 1085-1094
    • Cheng, H.B.1    Feng, Z.J.2    Cheng, K.3    Wang, Y.W.4
  • 6
    • 0029521515 scopus 로고
    • Studies on super-smooth polishing for aspherical optics (1st report)-contour measuring machine on large aspherical surfaces
    • Negishi M., Deguchi A., Ando M., Takimoto M., and Nakamura N. Studies on super-smooth polishing for aspherical optics (1st report)-contour measuring machine on large aspherical surfaces. Journal of the Japan Society for Precision Engineering 61 12 (1995) 1725-1729
    • (1995) Journal of the Japan Society for Precision Engineering , vol.61 , Issue.12 , pp. 1725-1729
    • Negishi, M.1    Deguchi, A.2    Ando, M.3    Takimoto, M.4    Nakamura, N.5
  • 7
    • 0035944478 scopus 로고    scopus 로고
    • Local material removal mechanism considering curvature effect in the polishing process of the small aspherical lens die
    • Yang M.Y., and Lee H.C. Local material removal mechanism considering curvature effect in the polishing process of the small aspherical lens die. Journal of Materials Processing Technology 116 2-3 (2001) 298-304
    • (2001) Journal of Materials Processing Technology , vol.116 , Issue.2-3 , pp. 298-304
    • Yang, M.Y.1    Lee, H.C.2
  • 9
    • 0034956314 scopus 로고    scopus 로고
    • Development of single step grinding system for large scale φ300 Si wafer: a total integrated fixed-abrasive solution
    • Eda H., Zhou L., Nakano H., Kondo R., and Shimizu J. Development of single step grinding system for large scale φ300 Si wafer: a total integrated fixed-abrasive solution. CIRP Annals-Manufacturing Technology 50 1 (2001) 225-228
    • (2001) CIRP Annals-Manufacturing Technology , vol.50 , Issue.1 , pp. 225-228
    • Eda, H.1    Zhou, L.2    Nakano, H.3    Kondo, R.4    Shimizu, J.5
  • 12
    • 0029694351 scopus 로고    scopus 로고
    • Improvement of form accuracy in axisymmetrical grinding by considering the form generation mechanism
    • Enomoto T., and Shimazaki Y. Improvement of form accuracy in axisymmetrical grinding by considering the form generation mechanism. Annals of the CIRP 45 1 (1996) 351-354
    • (1996) Annals of the CIRP , vol.45 , Issue.1 , pp. 351-354
    • Enomoto, T.1    Shimazaki, Y.2
  • 13
    • 17644432590 scopus 로고    scopus 로고
    • Axisymmetric aspherical form generation for large diameter optical components
    • Zhou L., Shimizu J., and Eda H. Axisymmetric aspherical form generation for large diameter optical components. Key Engineering Materials 257-258 (2004) 101-106
    • (2004) Key Engineering Materials , vol.257-258 , pp. 101-106
    • Zhou, L.1    Shimizu, J.2    Eda, H.3
  • 14
    • 0032142261 scopus 로고    scopus 로고
    • Study on precision grinding of micro aspherical surface (2nd report)-effects of tool errors on workpiece form accuracies and its compensation methods
    • Suzuki H., Tanaka K., Takeda H., Kawakami K., and Nishioka M. Study on precision grinding of micro aspherical surface (2nd report)-effects of tool errors on workpiece form accuracies and its compensation methods. Journal of the Japan Society for Precision Engineering 64 8 (1998) 1211-1215
    • (1998) Journal of the Japan Society for Precision Engineering , vol.64 , Issue.8 , pp. 1211-1215
    • Suzuki, H.1    Tanaka, K.2    Takeda, H.3    Kawakami, K.4    Nishioka, M.5
  • 15
    • 0037288126 scopus 로고    scopus 로고
    • A study on the form error compensation for aspheric lens machining
    • Tso P.L., and Chuang H.C. A study on the form error compensation for aspheric lens machining. Key Engineering Materials 238-239 (2003) 369-374
    • (2003) Key Engineering Materials , vol.238-239 , pp. 369-374
    • Tso, P.L.1    Chuang, H.C.2
  • 16
    • 35348833613 scopus 로고    scopus 로고
    • M.S.S. Zahmaty, A new grinding method for axisymmetrical aspheric surfaces of brittle materials, Doctoral Dissertation, Tohoku University, Japan, 1998.
  • 17
    • 0030259551 scopus 로고    scopus 로고
    • Technical note: a fast Gauss filtering algorithm for roughness measurements
    • Krystek M. Technical note: a fast Gauss filtering algorithm for roughness measurements. Precision Engineering 19 (1996) 198-200
    • (1996) Precision Engineering , vol.19 , pp. 198-200
    • Krystek, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.