Subsurface structures of monocrystalline silicon generated by nanogrinding

Key Engineering Materials

Volumn 389-390, Issue , 2009, Pages 465-468

  Huang, H ^a   Wu, Y Q ^a   Wang, Y ^a   Zou, J ^a   Zhou, L ^b  

^a UNIVERSITY OF QUEENSLAND   (Australia)

^b IBARAKI UNIVERSITY   (Japan)

Author keywords

Nanogrinding; Nanoscratch; Removal mechanism; Silicon; Subsurface damage

Indexed keywords

MATERIALS SCIENCE; SILICON;

DEPTH OF CUT; FORMATION MECHANISM; HIGH-PRESSURE PHASIS; NANO-GRINDING; NANO-SCRATCH; REMOVAL MECHANISM; SUB-SURFACE DAMAGE; SUBSURFACE STRUCTURES;

MONOCRYSTALLINE SILICON;

EID: 58149502713     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Article

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