Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics

Plasma Sources Science and Technology

Volumn 15, Issue 4, 2006, Pages 620-626

  Abdel Rahman, M ^a   Schulz Von Der Gathen, V ^b   Gans, T ^b   Niemi, K ^b   Dobele H F ^c  

^a Minia University ^*  (Egypt)

^b RUHR UNIVERSITY BOCHUM   (Germany)

^c UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; DISSOCIATION; EMISSION SPECTROSCOPY; FLUORESCENCE; HYDROGEN; LASER APPLICATIONS;

HYDROGEN PLASMA; MOLECULAR DISCHARGES; TWO-GAS ACTINOMETRY (TGA);

INDUCTIVELY COUPLED PLASMA;

EID: 33750601896     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/4/005     Document Type: Article

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