Ion energy distribution in H2/Ar plasma in a planar inductive discharge

Plasma Sources Science and Technology

Volumn 8, Issue 1, 1999, Pages 58-64

  Gudmundsson, J T ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF ICELAND   (Iceland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPOSITION EFFECTS; ELECTRIC DISCHARGES; HYDROGEN; IONS; MASS SPECTROMETERS; PRESSURE EFFECTS;

ION ENERGY DISTRIBUTION; PLASMA DISCHARGES; QUADRUPOLE MASS SPECTROMETERS;

PLASMA SHEATHS;

EID: 0033077143     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/1/007     Document Type: Article

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