Evolution of the microstructure in microcrystalline silicon prepared by very high frequency glow-discharge using hydrogen dilution

Journal of Applied Physics

Volumn 87, Issue 6, 2000, Pages 3137-3142

  Vallat Sauvain, E ^a   Kroll, U ^a   Meier, J ^a   Shah, A ^a   Pohl, J ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000624007     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372311     Document Type: Article

References (21)

1. S. Veprek and V. Marecek, Solid-State Electron. 11, 683 (1968).
2. J. Meier, R. Flückiger, H. Keppner, and A. Shah, Appl. Phys. Lett. 65, 860 (1994).
3. J. Meier et al., Proceedings of the 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conference, Vienna, Austria, 1998, Vol. 1, p. 375.
4. Y. Chen and S. Wagner, Appl. Phys. Lett. 75, 1125 (1999).
5. M. Luysberg, P. Hapke, R. Carius, and F. Finger, Philos. Mag. A 75, 31 (1997); L. Houben, M. Luysberg, P. Hapke, R. Carius, F. Finger, and H. Wagner, ibid. 77, 1447 (1998).
6. M. Luysberg, P. Hapke, R. Carius, and F. Finger, Philos. Mag. A 75, 31 (1997); L. Houben, M. Luysberg, P. Hapke, R. Carius, F. Finger, and H. Wagner, ibid. 77, 1447 (1998).
7. M. Nakata et al. Mater. Res. Soc. Symp. Proc. 192, 481 (1990).
8. U. Kroll, J. Meier, P. Torres, J. Pohl, and A. Shah, J. Non-Cryst. Solids 227-230, 69 (1998).
9. U. Kroll et al., J. Appl. Phys. 80, 4971 (1996).
10. I. Berbezier, Porous Silicon Science and Technology (Les Editions de Physique, Les Ulis, 1994).
11. M. K. Hatalis and D. W. Greve, J. Appl. Phys. 63, 2260 (1988).
12. J. S. Im and R. S. Sposili, MRS Bulletin, March 1996, p. 39, and references therein.
13. A. Poruba et al., Proceedings of the 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conference, Vienna, Austria, 1998, Vol. 1, p. 781.
14. J. Koh, Y. Lee, H. Fujwara, C. R. Wronski, and R. W. Collings, Appl. Phys. Lett. 73, 1526 (1998); J. Koh et al. ibid. 75, 2286 (1999).
15. J. Koh, Y. Lee, H. Fujwara, C. R. Wronski, and R. W. Collings, Appl. Phys. Lett. 73, 1526 (1998); J. Koh et al. ibid. 75, 2286 (1999).
16. K. Saito et al., Proceedings of the 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conference, Vienna, Austria, 1998, VoI 1, p. 351.
17. K. Yamamoto et al., Proceedings of the 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conference, Vienna, Austria, 1998, Vol. 2, p. 1284.
18. ASTM card number 27-1402.
19. A. Matsuda, K. Kumagai, and K. Tanaka, Jpn. J. Appl. Phys., Part 2 22, L34 (1982).
20. S. Veprek, Z. Iqbal, R. O. Kühne, P. Capezzuto, F. A. Sarott, and J. K. Gimzewski, J. Phys. C 16, 6241 (1983).
21. B. D. Cullity, Elements of X-Ray Diffraction, 2nd ed. (Addison-Wesley, Reading, MA, 1978), pp. 283 and 284.