Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 902-906

  Takagi, H ^a   Takahashi, M ^a   Maeda, R ^a   Onishi, Y ^b   Iriye, Y ^b   Iwasaki, T ^b   Hirai, Y ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b MIZUHO INFORMATION AND RESEARCH INSTITUTE   (Japan)

^c Osaka Prefecture University   (Japan)

Author keywords

COP; Finite element analysis; Numerical simulation; The generalized Maxwell model; Thermal imprint; WLF shift factor

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MAXWELL EQUATIONS; VISCOELASTICITY;

GENERALIZED MAXWELL MODEL; THERMAL IMPRINTS; VISCOELASTIC MODEL;

PLASTIC DEFORMATION;

EID: 44149092919     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.018     Document Type: Article

References (5)

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