Multiphase structure of hydrogen diluted a-SiC:H deposited by HWCVD

Materials Chemistry and Physics

Volumn 99, Issue 2-3, 2006, Pages 240-246

  Swain, Bibhu P ^a   Dusane, Rajiv O ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

a SiC:H; HWCVD; Microstructure; Multiphase; Photoluminescence

Indexed keywords

AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAIN SIZE AND SHAPE; HYDROGENATION; INFRARED SPECTROSCOPY; MICROSTRUCTURE; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; RAMAN SCATTERING; THIN FILMS; ULTRAVIOLET SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

A-SIC:H; AMORPHOUS SILICON CARBON; HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD); MULTIPHASE;

SILICON CARBIDE;

EID: 33747892750     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2005.10.018     Document Type: Article

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