Femtosecond laser-induced two-photon photopolymerization for structuring of micro-optical and photonic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7366, Issue , 2009, Pages

  Malinauskas, Mangirdas ^a   Gilbergs, Holger ^a   Purlys, Vytautas ^a   Žukauskas, Albertas ^a   Rutkauskas, Marius ^a   Gadonas, Roaldas ^a  

^a VILNIUS UNIVERSITY   (Lithuania)

Author keywords

3D nano structuring; Femtosecond laser microfabrication; Microlenses; Photonics; Photopolymerization; Polymer doping; Two photon absorption

Indexed keywords

3D NANO-STRUCTURING; 3D STRUCTURE; ADDITIONAL STRUCTURES; AXIAL RESOLUTIONS; DIFFRACTION LIMITS; EXPOSURE DOSE; FEMTO-SECOND LASER; FEMTOSECOND LASER MICROFABRICATION; FLUORESCENT DYES; FOCAL DISTANCES; HIGH NUMERICAL APERTURES; HYBRID SOL-GEL MATERIALS; IMAGING QUALITY; LATERAL DIMENSION; LIQUID POLYMERS; MICROOPTICAL; NON-LINEAR PHENOMENA; ORMOSIL; PHOTONIC BAND-GAP STRUCTURES; POLYMER DOPING; RHODAMINE 6G; SILICON-BASED; STRUCTURAL ELEMENTS; SUBMICRON; TEMPORAL CONTROLS; TWO-PHOTON ABSORPTION; TWO-PHOTON PHOTOPOLYMERIZATION; WOODPILE STRUCTURE;

ABSORPTION; DOPING (ADDITIVES); LASERS; LIGHT; LIGHT ABSORPTION; LUMINESCENCE OF ORGANIC SOLIDS; MICROANALYSIS; MICROFABRICATION; MICROLENSES; MICROMACHINING; MULTIPHOTON PROCESSES; OPTICAL MATERIALS; PHOTONS; PHOTOPOLYMERIZATION; PHOTORESISTS; POLYMERS; PULSED LASER APPLICATIONS; SOL-GELS; SURFACE ROUGHNESS; THREE DIMENSIONAL; ULTRASHORT PULSES; ZIRCONIUM;

LASER EXCITATION;

EID: 70349999251     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.821776     Document Type: Conference Paper

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