Multiple-spot parallel processing for laser micronanofabrication

Applied Physics Letters

Volumn 86, Issue 4, 2005, Pages

  Kato, Jun Ichi ^a   Takeyasu, Nobuyuki ^a   Adachi, Yoshihiro ^a   Sun Hong Bo, ^a,b   Kawata, Satoshi ^a,b  

^a RIKEN   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROLENSES; OPTIMIZATION; PARALLEL PROCESSING SYSTEMS; PHOTOPOLYMERIZATION; PHOTORESISTS; SCANNING; VECTORS;

LASER MICRONANOFABRICATION; MICROLENS ARRAYS (MLA); VECTOR SCANNING;

LASERS;

EID: 13644276619     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1855404     Document Type: Article

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