Comparing glass and plastic refractive microlenses fabricated with different technologies

Journal of Optics A: Pure and Applied Optics

Volumn 8, Issue 7, 2006, Pages

  Ottevaere, H ^a   Cox, R ^b   Herzig, H P ^c   Miyashita, T ^d   Naessens, K ^e   Taghizadeh, M ^f   Volkel R ^g   Woo, H J ^h   Thienpont, H ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b MICROFAB TECHNOLOGIES INC   (United States)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^d RICOH COMPANY LTD   (Japan)

^e GHENT UNIVERSITY   (Belgium)

^f HERIOT WATT UNIVERSITY   (United Kingdom)

^g SUSS MICROOPTICS SA   (Switzerland)

^h Korea Institute of Geosceince and Mineral Resources   (South Korea)

Author keywords

Fabrication technologies; Interferometry; Microlenses; Optical characterization; Refractive optics

Indexed keywords

GLASS; INTERFEROMETERS; LIGHT TRANSMISSION; MICROOPTICS; OPTICAL SYSTEMS; REFRACTIVE INDEX;

FABRICATION TECHNOLOGIES; OPTICAL CHARACTERIZATION; REFRACTIVE OPTICS;

MICROLENSES;

EID: 33745199603     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/8/7/S18     Document Type: Article

References (60)

1. Sinzinger S and Jahns J 1999 Microoptics (New York: Wiley-VCH)
2. Borrelli N F 1999 Part I: Optics and fabrication Microoptics Technology: Fabrication and Applications of Lens Arrays and Devices (New York: Dekker)
3. Borrelli N F, Morse D L, Bellman R H and Morgan W L 1985 Photolytic technique for producing microlenses in photosensitive glass Appl. Opt. 24 2520-5
4. Oikawa M, Iga K, Sanada T, Yamamoto N and Nishizawa K 1981 Array of distributed-index planar microlens prepared from ion-exchange technique Japan. J. Appl. Phys. 20 L296-8
5. 2 laser Appl. Opt. 37 627-31
6. Gale M T 1997 Replication, Micro-optics: Elements, Systems and Applications ed H P Herzig (London: Taylor and Francis) chapter 6
7. Keyes D L, Lamonte R R, McNally D and Bitritto M 2001 Polymers for photonics Photonics Spectra 35 (10)
8. Popovic Z D, Sprague R A and Neville Connell G A 1988 Technique for monolithic fabrication of microlens arrays Appl. Opt. 27 1281-4
9. Jay T R et al 1994 Preshaping photoresist for refractive microlens fabrication Opt. Eng. 33 3552-5
10. Ottevaere H, Volckaerts B, Lamprecht J, Schwider J, Hermanne A, Veretennicoff I and Thienpont H 2002 2D plastic microlens arrays by deep lithography with protons: fabrication and characterization J. Opt. A: Pure Appl. Opt. 4 S22-8
11. Ossmann C, Göttert J, Ilie M, Mohr J and Ruther P 1997 Proc. Microlens Arrays EOS Topical Mtg pp54-8
12. Croutxé-Barghorn C, Soppera O and Lougnot D J 2001 Fabrication of refractive microlens arrays by visible irradiation of acrylic monomers: influence of photonic parameters Eur. Phys. J.: Appl. Phys. 13 31-7
13. MacFarlane D L, Narayan V, Cox W R, Chen T and Hayes DJ 1994 Microjet fabrication of microlens arrays IEEE PTL 6 1112-4
14. Naessens K, Ottevaere H, Baets R, Van Daele P and Thienpont H 2003 Direct writing of microlenses in polycarbonate with excimer laser ablation Appl. Opt. 42 6349-59
15. Gale M T 1997 Direct writing of continuous relief micro-optics Micro-optics: Elements, Systems and Applications ed H P Herzig (London: Taylor and Francis) chapter 4
16. Kley E B, Possner T and Göring R 1993 Realization of micro-optics and integrated optic components by electron-beam lithographic surface profiling and ion exchange in glass Int. J. Optoelectron. 8 513-27
17. Khanarian G and Celanese H 2001 Optical properties of cyclic olefin copolymers Opt. Eng. 40 1024-9
18. Beich W S 2002 Specifying injection-molded plastic optics Photonics Spectra 40
19. Pedrotti F L and Pedrotti L S 1993 Optical instrumention Introduction to Optics 2nd edn (Englewood Cliffs, NJ: Prentice-Hall) chapter 6
20. Savage N 2002 The future is plastics SPIE's OE Magazine p44
21. http://www.gsoptics.com
22. http://www.sunex.com/doc/whitpap.pdf
23. Ottevaere H and Thienpont H 2004 Refractive optical microlenses: an introduction to nomenclature and characterization techniques Encyclopedia of Modern Optics vol 4 ed R D Guenther, D G Steel and L Bayvel (Oxford: Elsevier) pp21-43 (ISBN 0-12-227600-0)
24. Oikawa M, Iga K and Sanada T 1981 A distributed-index planar microlens made of plastics Japan. J. Appl. Phys. 20 L51-4
25. Moore D T 1980 Gradient-index optics: a review Appl. Opt. 19 (7)
26. Bähr J, Krackhardt U and Brenner K H 2001 Fabrication and testing of planar microlens arrays by ion exchange technique in glass Micro-and Nano-Optics For Optical Interconnection and Information Processing (Proc. SPIE vol 4455) (Bellingham, WA: SPIE) pp281-92
27. Oikawa M, Iga K and Sanada T 1981 Distributed-index planar microlens array prepared from deep electromigration Electron. Lett. 17 452-4
28. http://www.nsgamerica.com/
29. Hutley M C 1997 Refractive lenslet arrays Micro-optics: Elements, Systems and Applications ed H P Herzig (London: Taylor and Francis) chapter 5
30. Oikawa M, Nemoto H, Hamanaka K and Okuda E 1990 High numerical aperture planar microlens with swelled structure Appl. Opt. 29 4077-80
31. Bähr J, Brenner K H, Sinzinger S, Spick T and Testorf M 1994 Index-distributed planar microlenses for three-dimensional micro-optics fabricated by silver-sodium ion exchange in BGG35 substrates Appl. Opt. 33 5919-24
32. Hutley M C 1990 Optical techniques for the generation of microlens arrays J. Mod. Opt. 37 253-65
33. Daly D, Stevens R F, Hutley M C and Davies N 1990 The manufacture of microlenses by melting photoresist Meas. Sci. Technol. 1 759-66
34. Haselbeck S, Schreiber H, Schwider J and Streibl N 1993 Microlenses fabricated by melting a photoresist on a base layer Opt. Eng. 32 1322-4
35. Nussbaum P H, Völkel R, Herzig H P, Eisner M and Haselbeck S 1997 Design, fabrication and testing of microlens arrays for sensors and microsystems Pure Appl. Opt. 6 617-36
36. Stern M B and Jay T R 1994 Dry etching for coherent refractive microlens arrays Opt. Eng. 33 3547-51
37. Harriott L R, Scott R E, Cummings K D and Ambrose AF 1986 Micromachining of integrated optical structures Appl. Phys. Lett. 48 1704-6
38. Harder I, Lindlein N and Schwider J 2001 Fabrication of microlens arrays with the help of greytone lithography and RIE Annual Report Lehrstuhl für Optik p28
39. http://www. heptagon.fi/products
40. Volckaerts B, Ottevaere H, Vynck P, Debaes C, Tuteleers P, Hermanne A, Veretennicoff I and Thienpont H 2001 Deep lithography with protons: a generic fabrication technology for refractive micro-optical components and modules Asian J. Phys. 10 195-214
41. Brenner K-H, Frank M, Kufner M and Kufner S 1990 H+-Lithography for 3-D integration of optical circuits Appl. Opt. 29 3723-4
42. Woo H-J, Kim Y-S, Choi H-W, Hong W, Lee S, Kufner M and Kufner S 2001 Optimisation of microlenses fabricated by deep proton irradiation and styrene diffusion Microelectron. Eng. 57/58 945-51
43. Optoelectronic interconnects for integrated circuits (1996-2001), Advanced research initiative in microelectronics MEL-ARI OPTO http://www.intec.rug.ac.be/oiic/
44. Schmidt H 1994 Automated excimer laser carves microstructures Opt. Laser Eur. (9) 35-7
45. Mihailov S and Lazare S 1993 Fabrication of refractive microlens arrays by excimer laser ablation of amorphous Teflon Appl. Opt. 32 6211-8
46. Beinhorn F, Ihlemann J, Luther K and Troe J 1999 Microlens arrays generated by UV laser irradiation of doped PMMA Appl. Phys. A 68 709-13
47. Matz R, Weber H and Weimann G 1997 Laser-induced dry etching of integrated InP microlenses Appl. Phys. A 65 349-53
48. Naessens K, Van Daele P and Baets R 2001 Laser ablation based technique for flexible fabrication of microlenses in polymer materials Proc. 2nd Int. Symp. on Laser Precision Microfabrication (Singapore) pp124-7
49. Naessens K, Van Daele P and Baets R 2000 Microlens fabrication in PMMA with scanning excimer laser ablation techniques Proc. 5th Annual Symp. IEEE/LEOS Benelux Chapter (Delft, Netherlands) pp99-102
50. Chen T, Cox W R, Lenhard D and Hayes D J 2002 Microjet printing of high precision microlens array for packaging of fiber-optic components SPIE Proc. Photonics Packaging and Integration IV vol 4652 (Bellingham, WA: SPIE) pp136-41
51. Keyworth B P, Corazza D J, McMullin J N and Mabbott L 1997 Single-step fabrication of refractive microlens arrays Appl. Opt. 36 2198-202
52. Cox W R, Chen T and Hayes D J 2001 Micro-optics fabrication by inkjet printing Opt. Photon. News 12 32-5
53. Cox W R, Guan C and Hayes D J 2000 Microjet Printing of micro-optical interconnects and sensors Proc. SPIE Photonics (West, San Jose) vol 3852 (Bellingham, WA: SPIE) pp400-8
54. Hutley M C 1991 Microlens arrays Phys. World 4 27-32
55. Hartmann D M, Kibar O and Esener S C 2000 Characterization of a polymer microlens fabricated by use of the hydrophobic effect Opt. Lett. 25 975-7
56. Hartmann D M, Reiley D J and Esener S C 2001 Microlenses self-aligned to optical fibers fabricated using the hydrophobic effect IEEE Photon. Technol. Lett. 13 1088-90
57. http://www.solgel.com/labfoc/inm/micro_e.html
58. Fritze M, Stern M B and Wyatt P W 1998 Laser-fabricated glass microlens arrays Opt. Lett. 23 141-3
59. Kufner M and Kufner S 1997 Conclusions Micro-optics and Lithography (Brussels: VUB Press) chapter 11
60. Eisner M and Schwider J 1996 Transferring resist microlenses into silicon by reactive ion etching Opt. Eng. 35 2979-82