Refractive microlenses produced by excimer laser irradiation of poly (methyl methacrylate)

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 91-97

  Jensen, Martin F ^a,b   Krühne, Ulrich ^a   Christensen, Leif Højslet ^a   Geschke, Oliver ^b  

^a DANISH TECHNOLOGICAL INSTITUTE   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; DIFFERENTIAL EQUATIONS; EXCIMER LASERS; GLASS TRANSITION; ION BEAMS; LASER ABLATION; LIGHT REFRACTION; MATHEMATICAL MODELS; MILLING (MACHINING); PHOTOCHEMICAL REACTIONS; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES;

FOCUSED ION BEAM MILLING; POLYMER MICROLENSES; REFRACTIVE MICROLENSES; THERMAL PROCESSES;

MICROLENSES;

EID: 12344269866     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/014     Document Type: Article

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