Microlens arrays of high-refractive-index glass fabricated by femtosecond laser lithography

Applied Surface Science

Volumn 255, Issue 24, 2009, Pages 9750-9753

  Nishiyama, Hiroaki ^a   Nishii, Junji ^b   Mizoshiri, Mizue ^a   Hirata, Yoshinori ^a  

^a OSAKA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

3D surfaces; Femtosecond laser; Microlens; Micromachining

Indexed keywords

COMPOSITE MICROMECHANICS; FABRICATION; FEMTOSECOND LASERS; GERMANIUM OXIDES; GLASS; MICROLENSES; MICROMACHINING; MICROOPTICS; OPTICAL INSTRUMENT LENSES; PHOTORESISTS; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; SILICA;

3D SURFACE; FEMTOSECOND LASER LITHOGRAPHY; HIGH REFRACTIVE INDEX GLASS; HIGH TRANSPARENCY; MICRO-LENS; O2-PLASMA TREATMENT; THREE-DIMENSIONAL PATTERNS; THREE-DIMENSIONAL SURFACE;

REFRACTIVE INDEX;

EID: 70349440709     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.04.064     Document Type: Article

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