Two-dimensional plastic microlens arrays by deep lithography with protons: Fabrication and characterization

Journal of Optics A: Pure and Applied Optics

Volumn 4, Issue 4, 2002, Pages

  Ottevaere, H ^a   Volckaerts, B ^a   Lamprecht, J ^b   Schwider, J ^b   Hermanne, A ^a   Veretennicoff, I ^a   Thienpont, H ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Characterization; Deep lithography with protons; Interferometry; Refractive microlenses; Replication; Spherical aberration; Vapour diffusion

Indexed keywords

ABERRATIONS; DIFFUSION; INTERFEROMETRY; LEAST SQUARES APPROXIMATIONS; LITHOGRAPHY; POLYMETHYL METHACRYLATES; PROTONS;

DEEP LITHOGRAPHY; PLASTIC MICROLENS ARRAYS; ROOT MEAN SQUARE ROUGHNESSES;

MICROLENSES;

EID: 0036648327     PISSN: 14644258     EISSN: None     Source Type: Journal    
DOI: 10.1088/1464-4258/4/4/354     Document Type: Article

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