Fabrication of two-dimensional arrays of microlenses and their applications in photolithography

Journal of Micromechanics and Microengineering

Volumn 12, Issue 6, 2002, Pages 747-758

  Wu, Ming Hsien ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; GLASS; IMAGE QUALITY; LENSES; MICROLENSES; PHOTORESISTS; SILICONES; SUBSTRATES;

LIQUID POLYMERS; MICROPATTERN;

MICROOPTICS;

EID: 0036851058     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/6/305     Document Type: Article

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