Microlens fabrication by the modified LIGA process

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 520-523

  Lee, Sung Keun ^a   Lee, Kwang Cheol ^a   Lee, Seung S ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS TRANSITION; HEAT TREATMENT; MOLECULAR WEIGHT; PHOTORESISTS; POLYMETHYL METHACRYLATES; SURFACE ROUGHNESS; SURFACE TENSION; TEMPERATURE; X RAY LITHOGRAPHY;

DEEP X RAY EXPOSURE; MICROFABRICATION TECHNIQUE; MICROLENSES ARRAY;

MICROLENSES;

EID: 0036118051     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Production of separation nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics
2. Fabrication and characterization of microlenses realized by a modified LIGA process
3. Out-of-plane refractive microlens fabricated by surface micromachining
4. Parallel optical interconnection using self-adjusting microlenses on injection molded ferrules made by LIGA technique
5. Fabrication of microlenses by plasmaless isotropic etching combined with plastic moulding
6. Influence of developer temperature and resist material on the structure quality in deep X-ray lithography